Abstract
The effect of changes in the energy and current of low-energy (100–600 eV) ion stimulation on the structure of carbon hydrogenated coatings with silver inclusions (a-CH:Ag) synthesized by pulsed-plasma deposition is investigated. Transmission electron microscopy, electron diffraction, electron-energy loss spectroscopy, X-ray photoelectron spectroscopy, and absorption in the UV and visible regions are used to study the influence of the stimulation energy and current on the manifestation of ion-induced effects, such as defect formation, selective silver sputtering, surface diffusion, and silver particle segregation.
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ACKNOWLEDGMENTS
One of the authors (I.A.Z.) acknowledges the support of the Theoretical Physics and Mathematics Advancement Foundation “BASIS.” We thank S.S. Abramchuk for his help in conducting the TEM studies.
Funding
This work was supported by the Russian Foundation for Basic Research, project no. 20-32-90077.
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Translated by K. Shakhlevich
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Zavidovskii, I.A., Nishchak, O.Y., Savchenko, N.F. et al. Effect of Low-Energy Ion Assistance on the Structure and Optical Absorption of a-CH:Ag Composite Coatings. J. Exp. Theor. Phys. 134, 682–692 (2022). https://doi.org/10.1134/S1063776122050144
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DOI: https://doi.org/10.1134/S1063776122050144