Abstract
Synthesis of diamond-like coatings from a high-velocity flow of gas mixtures in flow regimes from free-molecular to continuum with flow velocities from hundreds to thousands meters per second at different specific flow rates and temperatures in the case of activation of gases on hot surfaces is studied experimentally. Deposition of carbon films at low (less than 0.15 Pa) and high (2600 Pa) pressures from a mixture of hydrogen and methane is considered. The hydrogen flow is computed by the Direct Simulation Monte Carlo (DSMC) method in accordance with test conditions with given surface temperatures and chemical transformations on the surfaces. It is found that coatings obtained at the high pressure contain particles typical for diamonds and unusual inclusions shaped as prisms with a hexagonal cross section.
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B. V. Deryagin, L. L. Builov, B. V. Spitsyn, et al., “Synthesis of Diamond Crystals on Non-Diamond Substrates,” Dokl. Akad. Nauk SSSR, 231(2), 333–344 (1976).
J. Butler, Y. Mankelevich, A. Cheesman, et al., “Understanding the Chemical Vapor Deposition of Diamond: Recent Progress,” J. Phys. Condens. Matter 21, 364201 (2009).
W. Yarbrough and R. Messier, “Current Issues and Problems in the Chemical Vapor Deposition of Diamond,” Science 247, 688–696 (1990).
J. Butler and H. Windischmann, “Developments in CVD-Diamond Synthesis during the Past Decade,” Materials Res. Soc. Bull. 23, 22 (1998).
Paul Chu and Liuhe Li, “Characterization of Amorphous and Nanocrystalline Carbon Films,” Mater. Chem. Phys. 96, 253–277 (2006).
J. Butler and A. Sumant, “The CVD of Nanodiamond Materials,” Chem. Vapor Depos. 14, 145–160 (2008).
A. K. Rebrov, “Review on Gas Jet Deposition,” in Proc. of the 4th Int. Conf. on Coating on Glass, Braunschweig, November 3–7, 2002 (Stadthalle, 2002), pp. 131–142.
V. A. Volodin, A. A. Emel’yanov, A. K. Rebrov, et al., “Experience of Deposition of Carbon Coatings by the Gas-Jet Method,” Inzh.-Fiz. Zh. 85(1) 93–101 (2012).
A. K. Rebrov, R. V. Maltsev, A. I. Safonov, and N. I. Timoshenko, “Activated Gas Jet Deposition,” Thin Solid Films 519, 4542–4544 (2011).
M. Yu. Plotnikov, “Supersonic Flow of Rarefied Gas around a Wire Grid,” Prikl. Mekh. Tekh. Fiz. 53(4), 16–25 (2012) [Appl. Mech. Tech. Phys. 53 (4), 482–489 (2012)].
I. B. Yudin, A. A. Emel’yanov, and A. K. Rebrov, “Study of a Jet Flow under Conditions of Activation by a Permeable Target by the Direct Simulation Monte Carlo Method,” in Modern Science: Research, Ideas, Results, and Technologies, No. 2 (NPVK Triakon, Kiev, 2011), pp. 208–214.
G. A. Bird, Molecular Gas Dynamics and the Direct Simulation of Gas Flows (Clarendon Press, Oxford, 1994).
Joe Smith and Wade Fitc, “Reflection and Dissociation of H2 on Tungsten,” J. Chem. Phys. 37(4), 898–904 (1962).
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Original Russian Text © A.A. Emel’yanov, A.K. Rebrov, I.B. Yudin.
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Translated from Prikladnaya Mekhanika i Tekhnicheskaya Fizika, Vol. 55, No. 2, pp. 94–100, March–April, 2014.
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Emel’yanov, A.A., Rebrov, A.K. & Yudin, I.B. Gas-jet synthesis of diamond-like films from an H2 + CH4 gas mixture glow. J Appl Mech Tech Phy 55, 270–275 (2014). https://doi.org/10.1134/S0021894414020096
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DOI: https://doi.org/10.1134/S0021894414020096