Abstract
The Raman and photoluminescence spectra of short-period C/SiC superlattices produced by RF magnetron sputtering are investigated. The Raman data indicate that, in 35-period Sitall/Ni/[C/SiC] superlattices with the C and SiC effective thicknesses of 3.5 and 3 Å, respectively, subjected to postgrowth avalanche annealing, the carbon layers assume the structure of multilayer graphene with 3–5 graphene sheets per superlattice period. A method for the fabrication of graphene-like carbon structures on the basis of short-period superlattices grown by RF sputtering is suggested and implemented.
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Original Russian Text © T.N. Zavaritskaya, N.N. Melnik, F.A. Pudonin, I.A. Sherstnev, 2016, published in Pis’ma v Zhurnal Eksperimental’noi i Teoreticheskoi Fiziki, 2016, Vol. 103, No. 5, pp. 385–388.
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Zavaritskaya, T.N., Melnik, N.N., Pudonin, F.A. et al. Multilayer graphene structure of carbon in short-period superlattices. Jetp Lett. 103, 341–344 (2016). https://doi.org/10.1134/S0021364016050131
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DOI: https://doi.org/10.1134/S0021364016050131