Structural and optical properties of a-plane GaN on r-plane sapphire with titanium oxide nanoparticles coated by spin coating method

Ji Hoon Kim; Jung Ho Park; Kwang Hyeon Baik; Sung-Min Hwang

doi:10.1117/12.893321

16 September 2011 Structural and optical properties of a-plane GaN on r-plane sapphire with titanium oxide nanoparticles coated by spin coating method

Ji Hoon Kim, Jung Ho Park, Kwang Hyeon Baik, Sung-Min Hwang

Author Affiliations +

Proceedings Volume 8123, Eleventh International Conference on Solid State Lighting; 812314 (2011) https://doi.org/10.1117/12.893321
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

We investigated the structural and optical characteristics of nonpolar a-plane (11-20) GaN structure grown on TiO₂ nanoparticles (NP)-coated r-plane sapphire by spin coating method. The surface morphology without any observable inverse pyramidal pits was observed by atomic force microscopy (AFM) measurement. Transmission electron microscopy (TEM) analysis revealed that the threading dislocations (TDs) and basal plane stacking faults (BSFs) densities were around 4.5 × 10⁹ cm^-2 and 3.1 × 10⁵ cm^-1, respectively. It was also found that the broadening of x-ray rocking curves (XRC) full width at a half maximum (FWHM) in Si-doped a-plane GaN on the TiO₂ NP-coated r-plane sapphire was affected by the tilt and twist of mosaic crystals. The photoluminescence (PL) intensity of TiO₂ NP-related MQWs sample at 295 K was approximately 18 % higher than that of the reference sample. This implied that the improved PL intensity was attributed to scattering of light by TiO₂ NP and InGaN/GaN MQWs interface of high quality.

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Ji Hoon Kim, Jung Ho Park, Kwang Hyeon Baik, and Sung-Min Hwang "Structural and optical properties of a-plane GaN on r-plane sapphire with titanium oxide nanoparticles coated by spin coating method", Proc. SPIE 8123, Eleventh International Conference on Solid State Lighting, 812314 (16 September 2011); https://doi.org/10.1117/12.893321

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