A hybrid CMOS-microfluidic contact imaging microsystem

Ritu Raj Singh; Lian Leng; Axel Guenther; Roman Genov

doi:10.1117/12.827862

21 August 2009 A hybrid CMOS-microfluidic contact imaging microsystem

Ritu Raj Singh, Lian Leng, Axel Guenther, Roman Genov

Proceedings Volume 7397, Biosensing II; 739712 (2009) https://doi.org/10.1117/12.827862
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

A hybrid CMOS/Microfluidic microsystem is presented. The microsystem integrates a soft polymer microfluidic network with a 64x128 pixel imager fabricated in low-cost standard 0.35 micron CMOS technology. The multiple microfluidic channels facilitate in-situ photochemical reactions of analytes and their detection directly on the surface of the CMOS photosensor array. The promixity between the analyte and the photosensor enhances the microsystem sensitivity, thus requiring only microliter volumes of the sample. Circuit techniques such as pixel binning and a two transistor reset path technique are employed to improve the imager sensitivity. The integrated microsystem is validated in on-chip chemiluminescence detection of luminol for the two microfluidic network prototypes designed.

Citation Download Citation

Ritu Raj Singh, Lian Leng, Axel Guenther, and Roman Genov "A hybrid CMOS-microfluidic contact imaging microsystem", Proc. SPIE 7397, Biosensing II, 739712 (21 August 2009); https://doi.org/10.1117/12.827862

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