Fabrication and characterization of individually addressable vertical-cavity surface-emitting laser arrays and integrated VCSEL/PIN detector arrays

A. M. Kasten; A. V. Giannopoulos; C. Long; C. Chen; K. D. Choquette

doi:10.1117/12.715086

7 February 2007 Fabrication and characterization of individually addressable vertical-cavity surface-emitting laser arrays and integrated VCSEL/PIN detector arrays

A. M. Kasten, A. V. Giannopoulos, C. Long, C. Chen, K. D. Choquette

Author Affiliations +

Proceedings Volume 6484, Vertical-Cavity Surface-Emitting Lasers XI; 64840C (2007) https://doi.org/10.1117/12.715086
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States

Abstract

With the emergence of the internet, the demand for high data transmission rates in short haul area networks and fiber-to-the- desktop applications is increasing every year. Densely packed one-dimensional and two-dimensional vertical-cavity surface-emitting laser (VCSEL) arrays offer new possibilities for future short haul parallel optical links, free-space optical interconnects at the chip-to-chip, board-to-board, and on-board level. In this paper, we describe the manufacturing process of individually addressable two-dimensional VCSEL arrays, PIN detector arrays, and integrated VCSEL / PIN detector arrays. We also present measurement results of the fabricated devices and comment on the reliability.

Citation Download Citation

A. M. Kasten, A. V. Giannopoulos, C. Long, C. Chen, and K. D. Choquette "Fabrication and characterization of individually addressable vertical-cavity surface-emitting laser arrays and integrated VCSEL/PIN detector arrays", Proc. SPIE 6484, Vertical-Cavity Surface-Emitting Lasers XI, 64840C (7 February 2007); https://doi.org/10.1117/12.715086

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