Electro-opto-mechanical cantilever-based logic gates

G. Rehder; M. I. Alayo; H. B. Medina; M. N. P. Carreño

doi:10.1117/12.699341

22 January 2007 Electro-opto-mechanical cantilever-based logic gates

G. Rehder, M. I. Alayo, H. B. Medina, M. N. P. Carreño

Proceedings Volume 6466, MOEMS and Miniaturized Systems VI; 64660C (2007) https://doi.org/10.1117/12.699341
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

In this work we describe the fabrication and characterization of micro-opto-electro-mechanical AND, OR and XOR logic gates based in a combination of optical and micro-electro-mechanical devices. These structures consist of silicon oxynitride-based optical waveguides, through which a light beam of 633-nm can be conducted, and mobile thermo-electro actuated cantilevers, which form part of the waveguide and can work as ON-OFF switches for the laser. These switches are combined to form AND, OR and XOR gates, allowing the laser light to pass or blocking the laser light when activated electrically. The cantilevers are fabricated by freeing regions of the waveguide, which is done by front side micromachining the silicon wafer used as substrate. Also, they are actuated electrically through the heating of a metallic resistance positioned in the device, where the applied current heats the cantilevers and, due to the difference in thermal expansion coefficients of the constituent materials, it is possible to produce a controlled motion proportional to the heating current. Therefore, the switches can be electrically polarized in on/off cycles allowing or blocking the light through the waveguide, similar to logic "1's" and "0's". These switches are adequately arranged to produce an output that is similar to the conventional digital logic gates through electric control (input) of cantilever-based ON-OFF switches.

Citation Download Citation

G. Rehder, M. I. Alayo, H. B. Medina, and M. N. P. Carreño "Electro-opto-mechanical cantilever-based logic gates", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660C (22 January 2007); https://doi.org/10.1117/12.699341

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