All optically driven MEMS deformable device via a photodetector array

Jed Khoury; Kenneth Vaccaro; Charles L. Woods; Bahareh Haji-saeed; Sandip K. Sengupta; Craig Armiento; William D. Goodhue; John Kierstead; Andrew Davis; William Clark

doi:10.1117/12.686272

12 October 2006 All optically driven MEMS deformable device via a photodetector array

Jed Khoury, Kenneth Vaccaro, Charles L. Woods, Bahareh Haji-saeed, Sandip K. Sengupta, Craig Armiento, William D. Goodhue, John Kierstead, Andrew Davis, William Clark

Author Affiliations +

Proceedings Volume 6368, Optoelectronic Devices: Physics, Fabrication, and Application III; 636804 (2006) https://doi.org/10.1117/12.686272
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

In this paper we demonstrate the first optical actuation of a single-pixel, deformable-mirror MEMS device through a direct cascade with a photodetector. Photovoltaic, p-i-n, and avalanche photodetectors were successfully utilized. Mirror deformations were monitored by interferometry. Deformation is quasilinear at low light intensities, and saturates at higher intensities. Actuation at picowatt light intensities has been accomplished by cascading with an avalanche photodetector. We also describe the fabrication of an integrated device consisting of an all optically addressed deformable-mirror MEMS suspended over a p-i-n photodetector. Initial demonstration of optical actuation of the deformable mirror using the newly integrated device is also presented.

Citation Download Citation

Jed Khoury, Kenneth Vaccaro, Charles L. Woods, Bahareh Haji-saeed, Sandip K. Sengupta, Craig Armiento, William D. Goodhue, John Kierstead, Andrew Davis, and William Clark "All optically driven MEMS deformable device via a photodetector array", Proc. SPIE 6368, Optoelectronic Devices: Physics, Fabrication, and Application III, 636804 (12 October 2006); https://doi.org/10.1117/12.686272

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available