Novel applications of MOEMS display and imaging

Ming C. Wu

doi:10.1117/12.608014

22 January 2005 Novel applications of MOEMS display and imaging

Ming C. Wu

Proceedings Volume 5715, Micromachining and Microfabrication Process Technology X; (2005) https://doi.org/10.1117/12.608014
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Significant progresses have been made in MOEMS for display, imaging, telecommunication, and bioinstrumentation applications. This talk will first provide an overview of the recent advances in micromirror technologies. Then it will discuss three novel applications using MEMS micromirrors. First, a large port count wavelength-selective switch using a one-dimensional array of two-axis analog micromirrors will be described. Then the fabrication and packaging of two-axis micromirrors for in vivo endoscopic optical coherence tomography (OCT) imaging will be presented. Finally a new "optoelectronic tweezers" for manipulating microparticles and biological cells using direct images of MOEMS spatial light modulators will be described.

Citation Download Citation

Ming C. Wu "Novel applications of MOEMS display and imaging", Proc. SPIE 5715, Micromachining and Microfabrication Process Technology X, (22 January 2005); https://doi.org/10.1117/12.608014

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