Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers

Joohan Kim; Halil Berberoglu; Xianfan Xu

doi:10.1117/12.479239

17 October 2003 Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers

Joohan Kim, Halil Berberoglu, Xianfan Xu

Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.479239
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States

Abstract

We discuss laser fabrication of microstructures in photoetchable glass-ceramics, FOTURAN. A KrF excimer laser (λ = 248 nm, τ = 25 ns) is used for surface micromachining, and a femtosecond laser (λ = 800 nm, τ = 80 fs) is used for fabricating three-dimensional structures. Other aspects of the machining, such as the fluence and crystallization depth resulting from these two methods are presented. A detailed analysis of the absorption process of both lasers in FOTURAN is discussed.

Citation Download Citation

Joohan Kim, Halil Berberoglu, and Xianfan Xu "Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); https://doi.org/10.1117/12.479239

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