Direct to digital holography for semiconductor wafer defect detection and review

C. E. Thomas Jr.; Tracy M. Bahm; Larry R. Baylor; Philip R. Bingham; Steven W. Burns; Matt Chidley; Long Dai; Robert J. Delahanty; Christopher J. Doti; Ayman El-Khashab; Robert L. Fisher; Judd M. Gilbert; James S. Goddard Jr.; Gregory R. Hanson; Joel D. Hickson; Martin A. Hunt; Kathy W. Hylton; George C. John; Michael L. Jones; Ken R. Macdonald; Michael W. Mayo; Ian McMackin; Dave R. Patek; John H. Price; David A. Rasmussen; Louis J. Schaefer; Thomas R. Scheidt; Mark A. Schulze; Philip D. Schumaker; Bichuan Shen; Randall G. Smith; Allen N. Su; Kenneth W. Tobin Jr.; William R. Usry; Edgar Voelkl; Karsten S. Weber; Paul G. Jones; Robert W. Owen

doi:10.1117/12.475659

12 July 2002 Direct to digital holography for semiconductor wafer defect detection and review

C. E. Thomas Jr., Tracy M. Bahm, Larry R. Baylor, Philip R. Bingham, Steven W. Burns, Matt Chidley, Long Dai, Robert J. Delahanty, Christopher J. Doti, Ayman El-Khashab, Robert L. Fisher, Judd M. Gilbert, James S. Goddard Jr., Gregory R. Hanson, Joel D. Hickson, Martin A. Hunt, Kathy W. Hylton, George C. John, Michael L. Jones, Ken R. Macdonald, Michael W. Mayo, Ian McMackin, Dave R. Patek, John H. Price, David A. Rasmussen, Louis J. Schaefer, Thomas R. Scheidt, Mark A. Schulze, Philip D. Schumaker, Bichuan Shen, Randall G. Smith, Allen N. Su, Kenneth W. Tobin Jr., William R. Usry, Edgar Voelkl, Karsten S. Weber, Paul G. Jones, Robert W. Owen

Author Affiliations +

Proceedings Volume 4692, Design, Process Integration, and Characterization for Microelectronics; (2002) https://doi.org/10.1117/12.475659
Event: Design, Process Integration, and Characterization for Microelectronics, 2002, Santa Clara, CA, United States

Abstract

A method for recording true holograms directly to a digital video medium in a single image has been invented. This technology makes the amplitude and phase for every pixel of the target object wave available. Since phase is proportional wavelength, this makes high-resolution metrology an implicit part of the holographic recording. Measurements of phase can be made to one hundredth or even one thousandth of a wavelength, so the technology is attractive for dining defects on semiconductor wafers, where feature sizes are now smaller than the wavelength of even deep UV light.

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C. E. Thomas Jr., Tracy M. Bahm, Larry R. Baylor, Philip R. Bingham, Steven W. Burns, Matt Chidley, Long Dai, Robert J. Delahanty, Christopher J. Doti, Ayman El-Khashab, Robert L. Fisher, Judd M. Gilbert, James S. Goddard Jr., Gregory R. Hanson, Joel D. Hickson, Martin A. Hunt, Kathy W. Hylton, George C. John, Michael L. Jones, Ken R. Macdonald, Michael W. Mayo, Ian McMackin, Dave R. Patek, John H. Price, David A. Rasmussen, Louis J. Schaefer, Thomas R. Scheidt, Mark A. Schulze, Philip D. Schumaker, Bichuan Shen, Randall G. Smith, Allen N. Su, Kenneth W. Tobin Jr., William R. Usry, Edgar Voelkl, Karsten S. Weber, Paul G. Jones, and Robert W. Owen "Direct to digital holography for semiconductor wafer defect detection and review", Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, (12 July 2002); https://doi.org/10.1117/12.475659

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