Surface-micromachined mirrors for scalable fiber optic switching applications

Uma Krishnamoorthy; Paul M. Hagelin; Jonathan Paul Heritage; Olav Solgaard

doi:10.1117/12.396498

22 August 2000 Surface-micromachined mirrors for scalable fiber optic switching applications

Uma Krishnamoorthy, Paul M. Hagelin, Jonathan Paul Heritage, Olav Solgaard

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396498
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

We present design, analysis and characterization of surface- micromachined mirrors developed for fiber-optical cross-connects (OXCs). These mirrors are controlled by electrostatic microactuators, and are optimized for our beam-steering OXC switch architecture. Their geometry leads to high-density switch matrices, and the absence of frictional hinges in their actuation mechanism allows highly repeatable operation. This mirror structure features an adjustable maximum deflection angle that can be set during initial assembly or dynamically varied by integration with a standard surface-micromachined linear actuator. A commercial three-layer polysilicon surface- micromachining process is used for fabrication of the micromirrors.

Citation Download Citation

Uma Krishnamoorthy, Paul M. Hagelin, Jonathan Paul Heritage, and Olav Solgaard "Surface-micromachined mirrors for scalable fiber optic switching applications", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396498

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