High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit

Pablo D. Ruiz; Jonathan M. Huntley

doi:10.1117/12.2272003

26 June 2017 High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit

Pablo D. Ruiz, Jonathan M. Huntley

Author Affiliations +

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103290G (2017) https://doi.org/10.1117/12.2272003
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

A single-shot technique to measure areal profiles on optically smooth and rough surfaces and for applications in noncooperative environments is presented. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light interferometer provides the input to a hyperspectral imaging system. Previous HSI implementations suffered from inefficient utilisation of the available pixels which limited the number of measured coordinates and/or unambiguous depth range. In this paper a >20-fold increase in pixel utilization is achieved through the use of a 2-D microlens array as proposed for integral field units in astronomy applications. This leads to a 35×35 channel system with an unambiguous depth range of 0.88 mm.

Citation Download Citation

Pablo D. Ruiz and Jonathan M. Huntley "High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103290G (26 June 2017); https://doi.org/10.1117/12.2272003

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available