Effect of nonlinearity by polarization beam splitter in the double passage heterodyne interferometer

Yarui Liu; Su'an Xu; Yaqiong Fu; Fei Qian; Feng Zhang

doi:10.1117/12.2214616

26 January 2016 Effect of nonlinearity by polarization beam splitter in the double passage heterodyne interferometer

Yarui Liu, Su'an Xu, Yaqiong Fu, Fei Qian, Feng Zhang

Proceedings Volume 9903, Seventh International Symposium on Precision Mechanical Measurements; 99032A (2016) https://doi.org/10.1117/12.2214616
Event: Seventh International Symposium on Precision Mechanical Measurements, 2015, Xia'men, China

Abstract

Nonlinearity error in double passage heterodyne interferometer is mainly caused by the nonideal properties of optical components. To solve this problem, in this paper, the nonlinearity error caused by nonideal properties of polarization beam splitter(PBS) including transmission coefficient and azimuth is numerically analyzed, and then the mathematical model for nonlinearity error is established and simulated. The results show that the nonlinearity error of the displacement increases from 0.0153 nm to 2.2766 nm with the azimuthal error ranging from 1° to 12°, and the nonlinearity error caused by the transmissivity and reflectivity of PBS is minor and can be ignored. The research results provide a theoretical basis for the reduction of the nonlinearity error in the double passage heterodyne interferometer.

Citation Download Citation

Yarui Liu, Su'an Xu, Yaqiong Fu, Fei Qian, and Feng Zhang "Effect of nonlinearity by polarization beam splitter in the double passage heterodyne interferometer", Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 99032A (26 January 2016); https://doi.org/10.1117/12.2214616

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