The production of molds for refractive top hat beam shaping devices requires very high precision of the applied grinding process. Form deviations below 100 nm are necessary to obtain a homogeneous illumination. Measurements of the surface topography of gauss to top hat beam shaping elements using white light interferometry are presented as well as results of optical measurements of the beam profile using a camera. Continuous diffractive beam shaping elements for beam splitting applications are designed to generate several sub-beams each carrying the same energy. In order to achieve this, form deviations of less than 50 nm are required. Measurements of the surface of a 1 x 5 beam splitter are compared with ideal beam splitter profiles. The resulting beam intensity distribution of a molded element is presented. |
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CITATIONS
Cited by 1 patent.
Beam shaping
Beam splitters
Glass molding
Glasses
Optical components
Chemical elements
Laser processing