Study of a-Si crystallization dependence on power and irradiation time using a CW green laser

M. Morales; D. Munoz-Martin; Y. Chen; O. García; J. J. García-Ballesteros; J. Cárabe; J. J. Gandía; C. Molpeceres

doi:10.1117/12.2041187

6 March 2014 Study of a-Si crystallization dependence on power and irradiation time using a CW green laser

M. Morales, D. Munoz-Martin, Y. Chen, O. García, J. J. García-Ballesteros, J. Cárabe, J. J. Gandía, C. Molpeceres

Proceedings Volume 8968, Laser-based Micro- and Nanoprocessing VIII; 89680U (2014) https://doi.org/10.1117/12.2041187
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

An advantage of laser crystallization over conventional heating methods is its ability to limit rapid heating and cooling to thin surface layers. Laser energy is used to heat the a-Si thin film to change the microstructure to poly-Si. Thin film samples of a-Si were irradiated with a CW-green laser source. Laser irradiated spots were produced by using different laser powers and irradiation times. These parameters are identified as key variables in the crystallization process. The power threshold for crystallization is reduced as the irradiation time is increased. When this threshold is reached the crystalline fraction increases lineally with power for each irradiation time. The experimental results are analysed with the aid of a numerical thermal model and the presence of two crystallization mechanisms are observed: one due to melting and the other due to solid phase transformation.

Citation Download Citation

M. Morales, D. Munoz-Martin, Y. Chen, O. García, J. J. García-Ballesteros, J. Cárabe, J. J. Gandía, and C. Molpeceres "Study of a-Si crystallization dependence on power and irradiation time using a CW green laser", Proc. SPIE 8968, Laser-based Micro- and Nanoprocessing VIII, 89680U (6 March 2014); https://doi.org/10.1117/12.2041187

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