High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry

Run Huang; Peng Su; James H. Burge; Lei Huang; Mourad Idir

doi:10.1117/1.OE.54.8.084103

5 August 2015 High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry

Run Huang, Peng Su, James H. Burge, Lei Huang, Mourad Idir

Author Affiliations +

Optical Engineering, Vol. 54, Issue 8, 084103 (August 2015). https://doi.org/10.1117/1.OE.54.8.084103

Abstract

The Software Configurable Optical Test System (SCOTS) uses deflectometry to measure surface slopes of general optical shapes without the need for additional null optics. Careful alignment of test geometry and calibration of inherent system error improve the accuracy of SCOTS to a level where it competes with interferometry. We report a SCOTS surface measurement of an off-axis superpolished elliptical x-ray mirror that achieves <1 nm root-mean-square accuracy for the surface measurement with low-order term included.

Citation Download Citation

Run Huang, Peng Su, James H. Burge, Lei Huang, and Mourad Idir "High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry," Optical Engineering 54(8), 084103 (5 August 2015). https://doi.org/10.1117/1.OE.54.8.084103

Published: 5 August 2015

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