Continuous-membrane surface-micromachined silicon deformable mirror

Thomas G. Bifano; Raji Krishnamoorthy Mali; John Kyle Dorton; Julie A. Perreault; Nelsimar Vandelli; Mark N. Horenstein; David A. Castanon

doi:10.1117/1.601598

1 May 1997 Continuous-membrane surface-micromachined silicon deformable mirror

Thomas G. Bifano, Raji Krishnamoorthy Mali, John Kyle Dorton, Julie A. Perreault, Nelsimar Vandelli, Mark N. Horenstein, David A. Castanon

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Optical Engineering, Vol. 36, Issue 5, (May 1997). https://doi.org/10.1117/1.601598

The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mirror was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces.

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Thomas G. Bifano, Raji Krishnamoorthy Mali, John Kyle Dorton, Julie A. Perreault, Nelsimar Vandelli, Mark N. Horenstein, and David A. Castanon "Continuous-membrane surface-micromachined silicon deformable mirror," Optical Engineering 36(5), (1 May 1997). https://doi.org/10.1117/1.601598

Published: 1 May 1997

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