Compact trench-based silicon-on-insulator rib waveguide ring resonator with large free spectral range

Yusheng Qian; Seunghyun Kim; Jiguo Song; Weisheng Hu; Greg L. Wojcik; Gregory P. Nordin

doi:10.1117/1.3274999

1 December 2009 Compact trench-based silicon-on-insulator rib waveguide ring resonator with large free spectral range

Yusheng Qian, Seunghyun Kim, Jiguo Song, Weisheng Hu, Greg L. Wojcik, Gregory P. Nordin

Author Affiliations +

Optical Engineering, Vol. 48, Issue 12, 124602 (December 2009). https://doi.org/10.1117/1.3274999

Abstract

We demonstrate a compact trench-based silicon-on-insulator (SOI) rib waveguide ring resonator comprised of trench-based bends and splitters. It has a perimeter of 50 μm and occupies an area of only 25×25 μm. The measured free spectral range (FSR) is 13.2 nm, which the largest reported for an SOI rib waveguide ring resonator. The measured FSR, full width at half maximum, and quality factor match reasonably well with analytical calculations. Further calculation shows that a FSR of 50.8 nm is achievable for an SOI rib waveguide ring resonator with a perimeter of 15 μm.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Yusheng Qian, Seunghyun Kim, Jiguo Song, Weisheng Hu, Greg L. Wojcik, and Gregory P. Nordin "Compact trench-based silicon-on-insulator rib waveguide ring resonator with large free spectral range," Optical Engineering 48(12), 124602 (1 December 2009). https://doi.org/10.1117/1.3274999

Published: 1 December 2009

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