An intelligent molecular flow sensor [see Note (1) on next page] enables direct gas flow measurements in the transitional and molecular flow regimes, as well as in the slip and continuum flow regimes, thereby enabling flow measurements at pressures ranging from vacuum through atmospheric. The properties of this sensor are investigated, along with the sensor’s transitional operating ranges. The IMFS operates as a mass flow sensor (directly measures the mass flow) in the transitional and molecular flow regimes, and it operates as a volumetric flow sensor in the continuum and slip flow regimes. Understanding of these properties and ranges of operation are critical for demanding leak testing, sealed closure integrity testing and vacuum test applications.
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September 2004
Research Article|
September 23 2004
Wide range flow sensor—Vacuum through viscous flow conditions
Hemi Sagi;
Hemi Sagi
ATC Inc., 4037 Guion Lane
, Indianapolis, Indiana 46268
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Yabin Zhao;
Yabin Zhao
School of Mechanical Engineering, Purdue University
, West Lafayette, Indiana 47907-2088
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S. T. Wereley
S. T. Wereley
a)
School of Mechanical Engineering, Purdue University
, West Lafayette, Indiana 47907-2088
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a)
Author to whom correspondence should be addressed; electronic mail: wereley@purdue.edu
J. Vac. Sci. Technol. A 22, 1992–1999 (2004)
Article history
Received:
May 02 2003
Accepted:
June 01 2004
Citation
Hemi Sagi, Yabin Zhao, S. T. Wereley; Wide range flow sensor—Vacuum through viscous flow conditions. J. Vac. Sci. Technol. A 1 September 2004; 22 (5): 1992–1999. https://doi.org/10.1116/1.1776181
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