Investigation of the processing effects of UV, heat and laser ablation on SU‐8 microturbines: A first approach by small angle neutron scattering

The purpose of this paper is to determine the nano‐sized characteristics of SU‐8 polymer micro‐electromechanical systems airflow metrology turbines samples. These microturbines were made to be the first using axial airflow for low air pressure response. This polymer may be affected during curing by UV and heat baking, as well as confined heat from laser ablation. Defects in the resin matrix may influence the material quality and hence the final turbine performance.

Small angle neutron scattering investigations were performed using the instrumentation of the Budapest Research Reactor.

The average sizes of the voids/cracks in the resin matrix of the turbines were determined and allowed the viability of making smaller even thinner rotor blades for higher spin and electrical output capability to be considered.

The obtained results have advanced the industrial applicability of the adopted technique in the considered sector of polymer analysis.