Abstract
We report the synthesis of millimeter-sized freestanding single-crystal heterostructure membranes with nanoscale thickness. On a substrate, a heteroepitaxial water-soluble sacrificial layer of followed by an encapsulated film is grown by pulsed laser deposition. A freestanding heterostructure membrane is obtained by etching the sacrificial layer. Its high crystalline quality is demonstrated via x-ray diffraction, electrical measurements, and scanning transmission electron microscopy.
- Received 2 April 2018
DOI:https://doi.org/10.1103/PhysRevMaterials.3.060801
©2019 American Physical Society