We report studies of $(\mathrm{G}\mathrm{a}\mathrm{A}\mathrm{s}{)}_n/(\mathrm{A}\mathrm{l}\mathrm{A}\mathrm{s}{)}_n$ ultrashort-period superlattices using synchrotron x-ray scattering. In particular, we demonstrate that interfaces of these superlattices contain features on two different length scales: namely, random atomic mixture and ordered mesoscopic domains. Both features are asymmetric on the two interfaces (AlAs-on-GaAs and GaAs-on-AlAs) for $n>2$. Periodic compositional stacking faults, arising from the intrinsic nature of molecular-beam epitaxy, are found in the superlattices. In addition, the effect of growth interruption on the interfacial structure is discussed. The relevant scattering theory is developed to give excellent fits to the data.

• Received 24 February 2003

DOI:https://doi.org/10.1103/PhysRevLett.91.106103