Proton magnetic resonance data are presented for a series of plasma-deposited $a$-Si: H films with hydrogen contents ranging from 32 to 8 at.%. Line-shape and line-width analysis leads to the conclusion that the spatial distribution of hydrogen is inhomogeneous in all samples.

• Received 2 October 1979

DOI:https://doi.org/10.1103/PhysRevLett.44.193