Abstract
Nanoscale surface topography evolution on Ge surfaces irradiated by 1 keV Kr ions is examined in both directions perpendicular and parallel to the projection of the ion beam on the surface. Grazing incidence small angle x-ray scattering is used to measure in situ the evolution of surface morphology via the linear dispersion relation. A transition from smoothing (stability) to pattern-forming instability is observed at a critical ion incidence angle of approximately 62° with respect to the surface normal. The linear theory quadratic coefficients which determine the surface stability/instability are determined as a function of bombardment angle. The Ge surface evolution during Kr irradiation is qualitatively similar to that observed for Ar irradiation of Si. However, in contrast to the case of Si under Ar irradiation, the critical angle separating stability and instability for Ge under Kr irradiation cannot be quantitatively reproduced by the simple Carter-Vishnyakov mass redistribution model.
- Received 17 July 2012
DOI:https://doi.org/10.1103/PhysRevB.86.245412
©2012 American Physical Society