We demonstrate a self-selective metal adsorption and pattern transformation process on vicinal Si(111) surfaces. When Au atoms are deposited onto the self-organized periodic Si(111) surface patterns, the Au atoms self-select to adsorb predominantly onto one of the two distinct domains, the Si(111) terrace or the step-bunched facet at different Au coverage. This leads to a systematic transformation of the surface pattern, whose domain population changes while its periodicity remains intact with the increasing Au coverage. A stress-domain model is used to explain the observed phenomenon. Our findings suggest a unique method for controlled functionalization of surfaces at the nanoscale, as illustrated further by domain-selective self-assembly of uniform ${\text{CoSi}}_2$ nanoclusters on the Au-functionalized vicinal Si(111) surface.

• Received 3 November 2010

DOI:https://doi.org/10.1103/PhysRevB.82.201406