The observation of coherent diffraction effects in recent measurements of x-ray reflectivity from Si surfaces is explained with the development of a simple kinematical theory. Some properties of the derived formalism are explored. We apply an algorithm developed by Gerchberg and Saxton and demonstrate its application to the reconstruction of the surface morphology from its coherent diffraction pattern. Initial testing with experimental data shows the method to be effective.

• Received 23 December 1996

DOI:https://doi.org/10.1103/PhysRevB.55.13193