High-resolution synchrotron x-ray diffraction from a Si(001) grating surface reveals resolution-limited grating interference peaks around each Bragg reflection. The peaks can be explained by kinematic scattering theory using the concept of a grating form factor. The positions and the intensities of the satellite peaks yield structural information such as the period, the width, and the height of the gratings, as well as its shape and its orientation and registry with respect to substrate lattice, and possible crystal strains.

• Received 5 August 1993

DOI:https://doi.org/10.1103/PhysRevB.48.17967