Hydride formation on the Si(100):H2O surface

Y. J. Chabal
Phys. Rev. B 29, 3677 – Published 15 March 1984
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Abstract

H2O chemisorption on Si(100) is studied with high-resolution infrared spectroscopy. Water molecules are found to dissociate upon room-temperature exposure forming Si-H and Si-OH. Mild annealing breaks up the O-H molecule resulting in oxide, monohydride, and dihydride species. The angle made by the effective dynamic dipole moment associated with the Si-H bond, with respect to the surface normal, is measured for the different hydrides formed.

  • Received 31 October 1983

DOI:https://doi.org/10.1103/PhysRevB.29.3677

©1984 American Physical Society

Authors & Affiliations

Y. J. Chabal

  • AT & T Bell Laboratories, Murray Hill, New Jersey 07974

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Issue

Vol. 29, Iss. 6 — 15 March 1984

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