Elastic cost of silicon step rebonding

F. Leroy, Y. Garreau, F. Cheynis, B. Croset, A. Coati, P. Müller, and G. Prévot
Phys. Rev. B 93, 045416 – Published 15 January 2016

Abstract

We study by grazing incidence x-ray diffraction the strain field induced by periodic double steps on a Si(1 1 15) surface that is a vicinal of a Si(001) surface misoriented by 5.4 towards the 110 direction. The best fit of the experimental structure factors is reached on the basis of the rebonded DB step edge model and the displacement field is well characterized assuming that steps are described by parallel rows of extended buried elastic dipoles. The dipole characteristics are the dipole position with respect to the step edge, the dipole amplitude (2.0±0.5 nN), and the lever arm Ω=5.3 and force Φ=3.7 orientations. We show that the dipole is dominated by a large stretch component localized between the lower and the upper corners of the step, which we assign to the presence of the rebonded atom at the step.

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  • Received 17 November 2015

DOI:https://doi.org/10.1103/PhysRevB.93.045416

©2016 American Physical Society

Physics Subject Headings (PhySH)

Condensed Matter, Materials & Applied Physics

Authors & Affiliations

F. Leroy1,*, Y. Garreau2,3, F. Cheynis1, B. Croset4, A. Coati3, P. Müller1, and G. Prévot4

  • 1Aix Marseille Université, CINaM UMR 7325, Campus de Luminy, Case 913, F-13288 Marseille Cedex, France
  • 2Université Paris Diderot, Sorbonne-Paris-Cité, MPQ, UMR 7162 CNRS, Bâtiment Condorcet, Case 7021, 75205 Paris Cedex 13, France
  • 3Synchrotron SOLEIL, l'Orme des Merisiers, Saint-Aubin, B.P. 48, 91192 Gif sur Yvette Cedex, France
  • 4Sorbonne Universités, UPMC Univ Paris 06, CNRS-UMR 7588, Institut des NanoSciences de Paris, F-75005 Paris, France

  • *leroy@cinam.univ-mrs.fr

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Issue

Vol. 93, Iss. 4 — 15 January 2016

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