Figure 1

Reflection microscope: Samples are deposited on a glass substrate and illuminated through the substrate by an immersion objective (IO). The backscattered field is collected by the same IO.Reuse & Permissions

Figure 2

Computation of the far-field intensity diffracted by a rectangular rod of width 600 nm and height 70 nm, when its permittivity contrast is constant (solid line, inset 1) or modulated by a cosine of spatial frequency $K=5k_0$ (dashed line, inset 2). The insets represent the sample with $\eta$ in gray scale. The illumination wavelength is 633 nm and the incident angle is ${50}^{°}$. Permittivity contrast values are (a) $\Delta \varepsilon =2$, (b) $\Delta \varepsilon =7$, and (c) $\Delta \varepsilon =14$.Reuse & Permissions

Figure 3

Imaging of two rods (width $=$ $50$ nm, height $=$ $25$ nm, and interdistance $=$ $50$ nm) in the single or multiple scattering regimes. (a, c, e) The rods have a relative permittivity of $1.01$. (b, d, f) The rods have a relative permittivity of $29.8+i7.3$ (germanium at 633 nm). (a, b) Map of the electric field modulus $\left|E\right|$ simulated inside the investigation domain $W$ for an incident angle of $-{50}^{°}$. (c) Permittivity map reconstructed from simulated far-field data (where the solid white line is the actual height profile). (d) Permittivity map reconstructed from the experimental data obtained with the tomographic diffractive microscope (where the solid white line is the experimental AFM height profile of the same sample). (e, f) Permittivity profile along the dashed white line shown in (c) or (d). (g) Normalized modulus of the Fourier transform of the permittivity profile of (e) (dashed line) and (f) (solid line); spatial frequencies are shown in $k_0$ units; dotted vertical lines indicate the Abbe frequency limit.Reuse & Permissions

Figure 4

(a) Reconstructed permittivity map for two rods spaced by 100 nm, with a width of 100 nm and a height of 50 nm. (b) Modulus of the field $\left|E\right|$ simulated when the rods are illuminated at $-{50}^{°}$.Reuse & Permissions