Absolute electron-impact cross sections have been measured from 0 to 200 eV for single ionization of 16 atoms (Mg, Fe, Cu, Ag, Al, Si, Ge, Sn, Pb, P, As, Sb, Bi, S, Se, and Te) with an estimated accuracy of ±10%. Combined with our recent measurements of He, Ne, Ar, Kr, Xe, F, Cl, Br, I, Ga, and In [Wetzel et al., Phys. Rev. A 35, 559 (1987); Hayes et al., ibid. 35, 578 (1987); Shul, Wetzel, and Freund, ibid. 39, 5588 (1989)], a set of 27 atomic single-ionization cross sections has now been measured with the same apparatus. In addition, cross sections are reported for double ionization of ten atoms and triple ionization of eight atoms. The measurements are made by crossing an electron beam with a 3-keV beam of neutral atoms, prepared by charge-transfer neutralization of a mass-selected ion beam. The critical measurement of absolute neutral beam flux is made with a calibrated pyroelectric crystal. The magnitudes of the single-ionization-peak cross sections decrease monotonically across rows of the periodic table from group IIIA (Al,Ga,In) to group VIIIA (Ar,Kr,Xe), varying much more than predicted by various empirical formulas and classical and quantum-mechanical theories.

• Received 6 October 1989

DOI:https://doi.org/10.1103/PhysRevA.41.3575