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Nanoscale imaging applications of soft X-ray microscope based on a gas-puff target source

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Published under licence by IOP Publishing Ltd
, , Citation P. W. Wachulak et al 2017 J. Phys.: Conf. Ser. 849 012050 DOI 10.1088/1742-6596/849/1/012050

1742-6596/849/1/012050

Abstract

A compact microscope based on nitrogen double stream gas puff target soft X-ray source, which emits radiation in the water-window spectral range, at the wavelength of λ = 2.88 nm, is presented. The microscope, employing ellipsoidal grazing incidence condenser and a Fresnel zone plate objective, is capable of capturing images with a 60 nm spatial resolution and exposure time as low as a few seconds. Examples of different applications of the SXR microscopy, and its applicability for various fields of science, are presented and discussed.

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10.1088/1742-6596/849/1/012050