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Understanding the limitations of the Super-X energy dispersive x-ray spectrometer as a function of specimen tilt angle for tomographic data acquisition in the S/TEM

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Published under licence by IOP Publishing Ltd
, , Citation T J A Slater et al 2014 J. Phys.: Conf. Ser. 522 012025 DOI 10.1088/1742-6596/522/1/012025

1742-6596/522/1/012025

Abstract

We have investigated the use of x-ray energy dispersive spectroscopy during tomographic hyperspectral imaging experiments in the scanning transmission electron microscope. In this work, we have found that for an analytical system employing a commercial high-tilt tomography holder the measured x-ray signal is limited by shadowing caused by the penumbra of the holder relative to the x-ray detector system. This limits the ability to perform quantitative, elemental tomographic analysis.

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10.1088/1742-6596/522/1/012025