Optimisation of the properties of a microfocused ion beam system

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, , Citation R J Amos et al 1988 J. Phys. E: Sci. Instrum. 21 86 DOI 10.1088/0022-3735/21/1/016

0022-3735/21/1/86

Abstract

The chromatic aberration of optical columns used to produce microfocused ion beams is examined in detail. Numerical solution of Poisson's equation and optimisation algorithms are used to ascertain the best possible design. The results show that, if the ultimate resolution of the column is limited by chromatic aberration, then microfocused spots of less than 20 nm diameter should be achievable with acceptable current densities for a number of technological applications.

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10.1088/0022-3735/21/1/016