Determination of electron energy distribution functions in surface wave produced plasmas. II. Measurements

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, , Citation U Kortshagen and H Schluter 1991 J. Phys. D: Appl. Phys. 24 1585 DOI 10.1088/0022-3727/24/9/010

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1 Inst. of Exp. Phys., II. Bochum Univ., Germany

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0022-3727/24/9/1585

Abstract

For pt.I see ibid., vol.24, p.1585-93 (1991). Electron energy distribution functions of surface wave produced argon plasmas are measured via second derivatives of Langmuir probe characteristics. An active compensation method for avoiding modifications by the RF electric field is employed. Good agreement with previous numerical solutions of the Boltzmann equation is observed.

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10.1088/0022-3727/24/9/010