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Direct UV patterning of thick hybrid glass films for micro-opto-mechanical structures

Direct UV patterning of thick hybrid glass films for micro-opto-mechanical structures

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The hybrid sol-gel method is applied to the fabrication of optical and mechanical structures into a photosensitive glass material. High optical quality thick films and structures are fabricated by a one-step spin-coating process followed by direct UV imprinting. A material thickness of 27.5 µm and a maximum patterned thickness of 17.4 µm at an aspect ratio of 0.6 have been achieved. The material exhibits a minimum transmittance of 97% between 400 and 1100 nm, a refractive index of 1.49, and an RMS surface roughness of 14.8 nm after development.

Inspec keywords: micro-optics; spin coating; optical fabrication; thick films; ultraviolet lithography; sol-gel processing; optical glass

Other keywords: direct UV patterning; high optical quality thick films; thick hybrid glass films; micro-opto-mechanical structures; 27.5 micron; hybrid sol-gel method; fabrication; one-step spin-coating process; MEMS; 17.4 micron

Subjects: Micromechanical and nanomechanical devices and systems; Surface treatment and coating techniques; Fabrication of MEMS and NEMS devices; Optical glass; Optoelectronics manufacturing; Optical materials; Optical fabrication, surface grinding; Micro-optical devices and technology; Micro-optical devices and technology; General fabrication techniques

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