SiGe micro-cooler
SiGe micro-cooler
- Author(s): Gehong Zeng ; A. Shakouri ; C. LaBounty ; G. Robinson ; E. Croke ; P. Abraham ; Xiaofeng Fan ; H. Reese ; J.E. Bowers
- DOI: 10.1049/el:19991435
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- Author(s): Gehong Zeng 1 ; A. Shakouri 2 ; C. LaBounty 1 ; G. Robinson 1 ; E. Croke 3 ; P. Abraham 1 ; Xiaofeng Fan 1 ; H. Reese 1 ; J.E. Bowers 1
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View affiliations
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Affiliations:
1: Department of Electrical and Computer Engineering, University of California, Santa Barbara, USA
2: Baskin School of Engineering, University of California, Santa Cruz, USA
3: HRL Laboratories, LLC, Malibu, USA
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Affiliations:
1: Department of Electrical and Computer Engineering, University of California, Santa Barbara, USA
- Source:
Volume 35, Issue 24,
25 November 1999,
p.
2146 – 2147
DOI: 10.1049/el:19991435 , Print ISSN 0013-5194, Online ISSN 1350-911X
Thin film SiGe heterostructure coolers have been fabricated and characterised. Cooling by as much as 1.1 K at room temperature and 1.6 K at a substrate temperature of 70°C over a 3 µm Si/SiGe superlattice barrier has been measured. This corresponds to cooling power densities of hundreds of watts per square centimetre.
Inspec keywords: silicon; semiconductor heterojunctions; semiconductor superlattices; semiconductor lasers; elemental semiconductors; semiconductor materials; thermoelectric devices; cooling; Ge-Si alloys
Other keywords:
Subjects: Design of specific laser systems; Semiconductor lasers; Semiconductor superlattices, quantum wells and related structures; Lasing action in semiconductors
References
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