Issue 16, 2013
From the journal:

Lab on a Chip

Nanoimprint lithography with a focused laser beam for the fabrication of nanopatterned microchannel molds†

Hyungjun Lim,a   Jihyeong Ryu,b   Geehong Kim,a   Kee-Bong Choi,a   Sunghwi Leea  and  Jaejong Lee*ab  

* Corresponding authors

a Korea Institute of Machinery and Materials, Daejeon 305-343, 156 Gajeongbuk-ro, South Korea
E-mail: jjlee@kimm.re.kr
Fax: +82-42-868-7721
Tel: +82-42-868-7145

b University of Science and Technology, Daejeon 305-350, 217 Gajeong-ro, South Korea

Abstract

We present a process based on nanoimprint lithography for the fabrication of a microchannel mold having nanopatterns formed at the bottoms of its microchannels. A focused laser beam selectively cures the resist in the micrometer scale during nanoimprint lithography. Nanopatterns within the microchannels may be used to control microfluidic behavior.

Graphical abstract: Nanoimprint lithography with a focused laser beam for the fabrication of nanopatterned microchannel molds

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Article information

DOI
https://doi.org/10.1039/C3LC50202C
Article type
Communication
Submitted
13 Feb 2013
Accepted
07 Jun 2013
First published
07 Jun 2013

Lab Chip, 2013,13, 3188-3191

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Nanoimprint lithography with a focused laser beam for the fabrication of nanopatterned microchannel molds

H. Lim, J. Ryu, G. Kim, K. Choi, S. Lee and J. Lee, Lab Chip, 2013, 13, 3188 DOI: 10.1039/C3LC50202C

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