Issue 8, 1992

Low-temperature dry etching of metal oxides and ZnS via formation of volatile metal β-diketonate complexes

Abstract

The reactions of CuO, PbO, ZnO, ZnS, V2O5, PbTiO3, PbZrO3, and YBa2Cu3O7–x, with 1,1,1,5,5,5-hexafiuoroacetyl-acetone result in formation of the corresponding metal β-diketonates with etch rates of 1 µm min–1for mixed copper(I)/(II) oxide films.

Article information

Article type
Paper

J. Mater. Chem., 1992,2, 893-894

Low-temperature dry etching of metal oxides and ZnS via formation of volatile metal β-diketonate complexes

F. Rousseau, A. Jain, T. T. Kodas, M. Hampden-Smith, J. D. Farr and R. Muenchausen, J. Mater. Chem., 1992, 2, 893 DOI: 10.1039/JM9920200893

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Spotlight

Advertisements