Issue 58, 2018, Issue in Progress

The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD

Abstract

Aluminium-doped zinc oxide (AZO) thin films were deposited via aerosol assisted chemical vapour deposition (AACVD) from zinc acetylacetonate and aluminium chloride at 450 °C. The precursor solutions consisted of methanol in a mixture with one other secondary solvent, including toluene, tetrahydrofuran, n-hexane, cyclohexane, and ethyl acetate. The crystal structures, elemental compositions and surface morphologies of the resulting AZO films were determined, as well as the optoelectronic properties. It was found that the more polar solvents enhanced growth in the (002) plane of the wurtzite crystal structure, and that solutions with low viscosities resulted in superior grain growth. The film deposited from a solution consisting of methanol and ethyl acetate displayed the lowest visible transmittance, due to carbon contamination. However, it also exhibited 60% lower resistivity, in comparison to the film deposited using methanol only. This suggests that optoelectronic properties can be tuned for specific photovoltaic devices.

Graphical abstract: The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD

Article information

Article type
Paper
Submitted
30 Jul 2018
Accepted
18 Sep 2018
First published
25 Sep 2018
This article is Open Access
Creative Commons BY license

RSC Adv., 2018,8, 33164-33173

The effect of solvent on Al-doped ZnO thin films deposited via aerosol assisted CVD

D. B. Potter, I. P. Parkin and C. J. Carmalt, RSC Adv., 2018, 8, 33164 DOI: 10.1039/C8RA06417B

This article is licensed under a Creative Commons Attribution 3.0 Unported Licence. You can use material from this article in other publications without requesting further permissions from the RSC, provided that the correct acknowledgement is given.

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