Vertical arrays of nanofluidic channels fabricated without nanolithography

Roman Sordan; Alessio Miranda; Floriano Traversi; Davide Colombo; Daniel Chrastina; Giovanni Isella; Massimo Masserini; Leo Miglio; Klaus Kern; Kannan Balasubramanian

doi:10.1039/B819520J

Vertical arrays of nanofluidic channels fabricated without nanolithography†

Roman Sordan,*^a Alessio Miranda,^a Floriano Traversi,^a Davide Colombo,^a Daniel Chrastina,^a Giovanni Isella,^a Massimo Masserini,^b Leo Miglio,^c Klaus Kern^de and Kannan Balasubramanian^d

Author affiliations

* Corresponding authors

^a L-NESS, Dipartimento di Fisica, Politecnico di Milano, Via Anzani 42, Como, Italy
E-mail: roman.sordan@como.polimi.it
Fax: +39 031 332 7617
Tel: +39 031 332 7622

^b Dipartimento di Medicina Sperimentale, Università degli Studi di Milano-Bicocca, Via Cadore 48, Monza, Italy

^c L-NESS, Dipartimento di Scienza dei Materiali, Università degli Studi di Milano-Bicocca, Via R. Cozzi 53, Milano, Italy

^d Max-Planck-Institut für Festkörperforschung, Heisenbergstr. 1, Stuttgart, Germany

^e Institute de Physiques des Nanostructures, Ecole Polytechnique Fédérale de Lausanne, Lausanne, Switzerland

Abstract

Vertical arrays of sealed nanofluidic channels, in which both cross-sectional dimensions are controllable down to 10 nm, were fabricated by selective side etching of a SiGe heterostructure comprised of layers of alternating Ge fractions. Capillary filling of these nanochannel arrays with fluorescent dye solutions was investigated using a confocal microscope. The feasibility of using nanochannels for size-based separation of biomolecules was demonstrated by imaging aggregates of tagged amyloid-beta peptide. The ability to integrate a large number of nanochannels shows promise for high throughput applications involving lab-on-a-chip systems.

Lab on a Chip

Vertical arrays of nanofluidic channels fabricated without nanolithography†

Abstract

Supplementary files

Article information

Download Citation

Permissions

Vertical arrays of nanofluidic channels fabricated without nanolithography

Social activity

Search articles by author

Spotlight

Advertisements