Issue 6, 2004
From the journal:

Analyst

Time-of-flight secondary ion mass spectrometry (TOF-SIMS):—versatility in chemical and imaging surface analysis

Rana N. S. Sodhia  

a Surface Interface Ontario, Department of Chemical Engineering & Applied Chemistry, University of Toronto, 200 College Street, Toronto, Ontario, Canada

Abstract

Time-of-flight secondary ion mass spectrometry (TOF-SIMS) has emerged as one of the most important and versatile surface analytical techniques available for advanced materials research. This arises from its excellent mass resolution, sensitivity and high spatial resolution providing both chemical and distributional (laterally and depth) information for a wide variety of materials and applications. Understanding the various modes of operation and the information that each provides is crucial to the analyst in order to optimise the type of data that is obtained. New developments in primary ion sources and the application of multivariate analysis techniques, which can only extend the versatility and applicability of the technique, are also discussed.

About
Cited by
Related
Download options Please wait...

Article information

DOI
https://doi.org/10.1039/B402607C
Article type
Education
First published
10 May 2004

Analyst, 2004,129, 483-487

Permissions

Request permissions

Time-of-flight secondary ion mass spectrometry (TOF-SIMS):—versatility in chemical and imaging surface analysis

R. N. S. Sodhi, Analyst, 2004, 129, 483 DOI: 10.1039/B402607C

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements