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Nongenetic optical neuromodulation with silicon-based materials

Nature Protocols volume 14, pages 1339–1376 (2019)Cite this article

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Abstract

Optically controlled nongenetic neuromodulation represents a promising approach for the fundamental study of neural circuits and the clinical treatment of neurological disorders. Among the existing material candidates that can transduce light energy into biologically relevant cues, silicon (Si) is particularly advantageous due to its highly tunable electrical and optical properties, ease of fabrication into multiple forms, ability to absorb a broad spectrum of light, and biocompatibility. This protocol describes a rational design principle for Si-based structures, general procedures for material synthesis and device fabrication, a universal method for evaluating material photoresponses, detailed illustrations of all instrumentation used, and demonstrations of optically controlled nongenetic modulation of cellular calcium dynamics, neuronal excitability, neurotransmitter release from mouse brain slices, and brain activity in the mouse brain in vivo using the aforementioned Si materials. The entire procedure takes ~4–8 d in the hands of an experienced graduate student, depending on the specific biological targets. We anticipate that our approach can also be adapted in the future to study other systems, such as cardiovascular tissues and microbial communities.

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Fig. 1: A rational design principle for Si structures for optically controlled neuromodulation.
Fig. 2: Schematic overview of the entire protocol.
Fig. 3: Experimental setup for the CVD growth of Si materials.
Fig. 4: Structural characterizations of Si material building blocks.
Fig. 5: The fabrication process for the PDMS-supported Si mesh (Steps 25–43).
Fig. 6: Experimental setup of the photoresponse measurement (Steps 44–50).
Fig. 7: Experimental setups for the in vitro photostimulation of cultured neurons (Steps 51–90).
Fig. 8: Experimental setup for the photostimulation of acute brain slices (Steps 91–105).
Fig. 9: Experimental setup for the in vivo photostimulation experiment (Steps 106–122).
Fig. 10: Expected results of Si-based optically controlled neuromodulation.

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Data availability

The authors declare that all data supporting the findings of this study are available within the original papers. Other supporting data are available upon reasonable request to the corresponding authors.

References

  1. Ashkan, K., Rogers, P., Bergman, H. & Ughratdar, I. Insights into the mechanisms of deep brain stimulation. Nat. Rev. Neurol. 13, 548–554 (2017).

    Article  Google Scholar 

  2. Famm, K., Litt, B., Tracey, K. J., Boyden, E. S. & Slaoui, M. Drug discovery: a jump-start for electroceuticals. Nature 496, 159–161 (2013).

    Article  CAS  Google Scholar 

  3. Wichmann, T. & Delong, M. R. Deep brain stimulation for neurologic and neuropsychiatric disorders. Neuron 52, 197–204 (2006).

    Article  CAS  Google Scholar 

  4. Fisher, R. S. & Velasco, A. L. Electrical brain stimulation for epilepsy. Nat. Rev. Neurol. 10, 261–270 (2014).

    Article  Google Scholar 

  5. Jefferys, J. G. Nonsynaptic modulation of neuronal activity in the brain: electric currents and extracellular ions. Physiol. Rev. 75, 689–723 (1995).

    Article  CAS  Google Scholar 

  6. Fregni, F. & Pascual-Leone, A. Technology insight: noninvasive brain stimulation in neurology—perspectives on the therapeutic potential of rTMS and tDCS. Nat. Clin. Pract. Neurol. 3, 383–393 (2007).

    Article  Google Scholar 

  7. Perlmutter, J. S. & Mink, J. W. Deep brain stimulation. Annu. Rev. Neurosci. 29, 229–257 (2006).

    Article  CAS  Google Scholar 

  8. Kringelbach, M. L., Jenkinson, N., Owen, S. L. & Aziz, T. Z. Translational principles of deep brain stimulation. Nat. Rev. Neurosci. 8, 623–635 (2007).

    Article  CAS  Google Scholar 

  9. Chen, R., Canales, A. & Anikeeva, P. Neural recording and modulation technologies. Nat. Rev. Mater. 2, 16093 (2017).

    Article  CAS  Google Scholar 

  10. Lacour, S. P., Courtine, G. & Guck, J. Materials and technologies for soft implantable neuroprostheses. Nat. Rev. Mater. 1, 16063 (2016).

    Article  CAS  Google Scholar 

  11. Salatino, J. W., Ludwig, K. A., Kozai, T. D. Y. & Purcell, E. K. Glial responses to implanted electrodes in the brain. Nat. Biomed. Eng. 1, 862–877 (2017).

    Article  Google Scholar 

  12. Jeong, J. W. et al. Soft materials in neuroengineering for hard problems in neuroscience. Neuron 86, 175–186 (2015).

    Article  CAS  Google Scholar 

  13. Minev, I. R. et al. Electronic dura mater for long-term multimodal neural interfaces. Science 347, 159–163 (2015).

    Article  CAS  Google Scholar 

  14. Boyden, E. S., Zhang, F., Bamberg, E., Nagel, G. & Deisseroth, K. Millisecond-timescale, genetically targeted optical control of neural activity. Nat. Neurosci. 8, 1263–1268 (2005).

    Article  CAS  Google Scholar 

  15. Zhang, F. et al. The microbial opsin family of optogenetic tools. Cell 147, 1446–1457 (2011).

    Article  CAS  Google Scholar 

  16. Zhang, F. et al. Multimodal fast optical interrogation of neural circuitry. Nature 446, 633–639 (2007).

    Article  CAS  Google Scholar 

  17. Yizhar, O., Fenno, L. E., Davidson, T. J., Mogri, M. & Deisseroth, K. Optogenetics in neural systems. Neuron 71, 9–34 (2011).

    Article  CAS  Google Scholar 

  18. Bareket, L. et al. Semiconductor nanorod-carbon nanotube biomimetic films for wire-free photostimulation of blind retinas. Nano Lett. 14, 6685–6692 (2014).

    Article  CAS  Google Scholar 

  19. Carvalho-de-Souza, J. L. et al. Photosensitivity of neurons enabled by cell-targeted gold nanoparticles. Neuron 86, 207–217 (2015).

    Article  CAS  Google Scholar 

  20. Ghezzi, D. et al. A polymer optoelectronic interface restores light sensitivity in blind rat retinas. Nat. Photonics 7, 400–406 (2013).

    Article  CAS  Google Scholar 

  21. Maya-Vetencourt, J. F. et al. A fully organic retinal prosthesis restores vision in a rat model of degenerative blindness. Nat. Mater. 16, 681–689 (2017).

    Article  CAS  Google Scholar 

  22. Kim, D. H. et al. Stretchable and foldable silicon integrated circuits. Science 320, 507–511 (2008).

    Article  CAS  Google Scholar 

  23. Patolsky, F. et al. Detection, stimulation, and inhibition of neuronal signals with high-density nanowire transistor arrays. Science 313, 1100–1104 (2006).

    Article  CAS  Google Scholar 

  24. Tian, B. et al. Three-dimensional, flexible nanoscale field-effect transistors as localized bioprobes. Science 329, 830–834 (2010).

    Article  CAS  Google Scholar 

  25. Tian, B. et al. Macroporous nanowire nanoelectronic scaffolds for synthetic tissues. Nat. Mater. 11, 986–994 (2012).

    Article  CAS  Google Scholar 

  26. Jiang, Y. & Tian, B. Inorganic semiconductor biointerfaces. Nat. Rev. Mater. 3, 473–490 (2018).

    Article  Google Scholar 

  27. Wang, W., Wu, S., Reinhardt, K., Lu, Y. & Chen, S. Broadband light absorption enhancement in thin-film silicon solar cells. Nano Lett. 10, 2012–2018 (2010).

    Article  CAS  Google Scholar 

  28. Wang, K. X., Yu, Z., Liu, V., Cui, Y. & Fan, S. Absorption enhancement in ultrathin crystalline silicon solar cells with antireflection and light-trapping nanocone gratings. Nano Lett. 12, 1616–1619 (2012).

    Article  CAS  Google Scholar 

  29. Hong, G., Antaris, A. L. & Dai, H. Near-infrared fluorophores for biomedical imaging. Nat. Biomed. Eng. 1, 0010 (2017).

    Article  Google Scholar 

  30. Yun, S. H. & Kwok, S. J. J. Light in diagnosis, therapy and surgery. Nat. Biomed. Eng. 1, 0008 (2017).

    Article  Google Scholar 

  31. Tian, B. et al. Coaxial silicon nanowires as solar cells and nanoelectronic power sources. Nature 449, 885–889 (2007).

    Article  CAS  Google Scholar 

  32. Walter, M. G. et al. Solar water splitting cells. Chem. Rev. 110, 6446–6473 (2010).

    Article  CAS  Google Scholar 

  33. Hochbaum, A. I. et al. Enhanced thermoelectric performance of rough silicon nanowires. Nature 451, 163–167 (2008).

    Article  CAS  Google Scholar 

  34. Roder, P. B., Smith, B. E., Davis, E. J. & Pauzauskie, P. J. Photothermal heating of nanowires. J. Phys. Chem. C 118, 1407–1416 (2014).

    Article  CAS  Google Scholar 

  35. Jiang, Y. et al. Heterogeneous silicon mesostructures for lipid-supported bioelectric interfaces. Nat. Mater. 15, 1023–1030 (2016).

    Article  CAS  Google Scholar 

  36. Parameswaran, R. et al. Photoelectrochemical modulation of neuronal activity with free-standing coaxial silicon nanowires. Nat. Nanotechnol. 13, 260–266 (2018).

    Article  CAS  Google Scholar 

  37. Jiang, Y. et al. Rational design of silicon structures for optically controlled multiscale biointerfaces. Nat. Biomed. Eng. 2, 508–521 (2018).

    Article  Google Scholar 

  38. Verkhratsky, A., Krishtal, O. A. & Petersen, O. H. From Galvani to patch clamp: the development of electrophysiology. Pflügers Arch. 453, 233–247 (2006).

    Article  CAS  Google Scholar 

  39. Sakmann, B. & Neher, E. Single-Channel Recording 2nd edn (Springer, New York, 1995).

  40. Hai, A., Shappir, J. & Spira, M. E. Long-term, multisite, parallel, in-cell recording and stimulation by an array of extracellular microelectrodes. J. Neurophysiol. 104, 559–568 (2010).

    Article  CAS  Google Scholar 

  41. Spira, M. E. & Hai, A. Multi-electrode array technologies for neuroscience and cardiology. Nat. Nanotechnol. 8, 83–94 (2013).

    Article  CAS  Google Scholar 

  42. Robinson, J. T. et al. Vertical nanowire electrode arrays as a scalable platform for intracellular interfacing to neuronal circuits. Nat. Nanotechnol. 7, 180–184 (2012).

    Article  CAS  Google Scholar 

  43. Ghezzi, D. et al. A hybrid bioorganic interface for neuronal photoactivation. Nat. Commun. 2, 166 (2011).

    Article  Google Scholar 

  44. Chen, R., Romero, G., Christiansen, M. G., Mohr, A. & Anikeeva, P. Wireless magnetothermal deep brain stimulation. Science 347, 1477–1480 (2015).

    Article  CAS  Google Scholar 

  45. Dobson, J. Remote control of cellular behaviour with magnetic nanoparticles. Nat. Nanotechnol. 3, 139–143 (2008).

    Article  CAS  Google Scholar 

  46. Huang, H., Delikanli, S., Zeng, H., Ferkey, D. M. & Pralle, A. Remote control of ion channels and neurons through magnetic-field heating of nanoparticles. Nat. Nanotechnol. 5, 602–606 (2010).

    Article  CAS  Google Scholar 

  47. Legon, W. et al. Transcranial focused ultrasound modulates the activity of primary somatosensory cortex in humans. Nat. Neurosci. 17, 322–329 (2014).

    Article  CAS  Google Scholar 

  48. Marino, A. et al. Piezoelectric nanoparticle-assisted wireless neuronal stimulation. ACS Nano 9, 7678–7689 (2015).

    Article  CAS  Google Scholar 

  49. Tufail, Y. et al. Transcranial pulsed ultrasound stimulates intact brain circuits. Neuron 66, 681–694 (2010).

    Article  CAS  Google Scholar 

  50. Tufail, Y., Yoshihiro, A., Pati, S., Li, M. M. & Tyler, W. J. Ultrasonic neuromodulation by brain stimulation with transcranial ultrasound. Nat. Protoc. 6, 1453–1470 (2011).

    Article  CAS  Google Scholar 

  51. Tyler, W. J., Lani, S. W. & Hwang, G. M. Ultrasonic modulation of neural circuit activity. Curr. Opin. Neurobiol. 50, 222–231 (2018).

    Article  CAS  Google Scholar 

  52. Tyler, W. J. et al. Remote excitation of neuronal circuits using low-intensity, low-frequency ultrasound. PLoS ONE 3, e3511 (2008).

    Article  Google Scholar 

  53. Montgomery, K. L., Iyer, S. M., Christensen, A. J., Deisseroth, K. & Delp, S. L. Beyond the brain: optogenetic control in the spinal cord and peripheral nervous system. Sci. Transl. Med. 8, 337rv5 (2016).

    Article  Google Scholar 

  54. Maimon, B. E., Sparks, K., Srinivasan, S., Zorzos, A. N. & Herr, H. M. Spectrally distinct channelrhodopsins for two-colour optogenetic peripheral nerve stimulation. Nat. Biomed. Eng. 2, 485–496 (2018).

    Article  Google Scholar 

  55. Klapoetke, N. C. et al. Independent optical excitation of distinct neural populations. Nat. Methods 11, 338–346 (2014).

    Article  CAS  Google Scholar 

  56. Lorach, H. et al. Photovoltaic restoration of sight with high visual acuity. Nat. Med. 21, 476–482 (2015).

    Article  CAS  Google Scholar 

  57. Mandel, Y. et al. Cortical responses elicited by photovoltaic subretinal prostheses exhibit similarities to visually evoked potentials. Nat. Commun. 4, 1980 (2013).

    Article  Google Scholar 

  58. Mathieson, K. et al. Photovoltaic retinal prosthesis with high pixel density. Nat. Photonics 6, 391–397 (2012).

    Article  CAS  Google Scholar 

  59. Lugo, K., Miao, X., Rieke, F. & Lin, L. Y. Remote switching of cellular activity and cell signaling using light in conjunction with quantum dots. Biomed. Opt. Express 3, 447–454 (2012).

    Article  CAS  Google Scholar 

  60. Pappas, T. C. et al. Nanoscale engineering of a cellular interface with semiconductor nanoparticle films for photoelectric stimulation of neurons. Nano Lett. 7, 513–519 (2007).

    Article  CAS  Google Scholar 

  61. Rand, D. et al. Direct electrical neurostimulation with organic pigment photocapacitors. Adv. Mater. 30, e1707292 (2018).

    Article  Google Scholar 

  62. Sytnyk, M. et al. Cellular interfaces with hydrogen-bonded organic semiconductor hierarchical nanocrystals. Nat. Commun. 8, 91 (2017).

    Article  Google Scholar 

  63. Sato, T., Shapiro, M. G. & Tsao, D. Y. Ultrasonic neuromodulation causes widespread cortical activation via an indirect auditory mechanism. Neuron 98, 1031–1041 (2018).

    Article  CAS  Google Scholar 

  64. Guo, H. et al. Ultrasound produces extensive brain activation via a cochlear pathway. Neuron 98, 1020–1030 (2018).

    Article  CAS  Google Scholar 

  65. Yoo, S., Hong, S., Choi, Y., Park, J. H. & Nam, Y. Photothermal inhibition of neural activity with near-infrared-sensitive nanotransducers. ACS Nano 8, 8040–8049 (2014).

    Article  CAS  Google Scholar 

  66. Rogers, J. A., Lagally, M. G. & Nuzzo, R. G. Synthesis, assembly and applications of semiconductor nanomembranes. Nature 477, 45–53 (2011).

    Article  CAS  Google Scholar 

  67. Patolsky, F., Zheng, G. & Lieber, C. M. Fabrication of silicon nanowire devices for ultrasensitive, label-free, real-time detection of biological and chemical species. Nat. Protoc. 1, 1711–1724 (2006).

    Article  CAS  Google Scholar 

  68. Zhao, D. et al. Triblock copolymer syntheses of mesoporous silica with periodic 50 to 300 angstrom pores. Science 279, 548–552 (1998).

    Article  CAS  Google Scholar 

  69. Kleitz, F., Choi, S. H. & Ryoo, R. Cubic Ia3d large mesoporous silica: synthesis and replication to platinum nanowires, carbon nanorods and carbon nanotubes. Chem. Commun. 2003, 2136-2137 (2003).

  70. Fang, Y. et al. Texturing silicon nanowires for highly localized optical modulation of cellular dynamics. Nano Lett. 18, 4487–4492 (2018).

    Article  CAS  Google Scholar 

  71. Merrill, D. R., Bikson, M. & Jefferys, J. G. Electrical stimulation of excitable tissue: design of efficacious and safe protocols. J. Neurosci. Methods 141, 171–198 (2005).

    Article  Google Scholar 

  72. Luo, Z. et al. Atomic gold-enabled three-dimensional lithography for silicon mesostructures. Science 348, 1451–1455 (2015).

    Article  CAS  Google Scholar 

  73. Melli, G. & Hoke, A. Dorsal root ganglia sensory neuronal cultures: a tool for drug discovery for peripheral neuropathies. Expert Opin. Drug. Discov. 4, 1035–1045 (2009).

    Article  CAS  Google Scholar 

  74. Oesterle, A. with Sutter Instrument Company. Pipette cookbook 2018: P-97 & P-1000 micropipette pullers. https://www.sutter.com/PDFs/pipette_cookbook.pdf (2018).

  75. Molecular Devices. The Axon™ guide: a guide to electrophysiology and biophysics laboratory techniques. https://mdc.custhelp.com/euf/assets/content/Axon%20Guide%203rd%20edition.pdf (2012).

  76. Molleman, A. Patch Clamping: An Introductory Guide to Patch Clamp Electrophysiology (John Wiley & Sons, Chichester, UK, 2003).

  77. Rueda, A. G. Whole cell patch clamp recordings for characterizing neuronal electrical properties of iPSC-derive neurons. https://docs.axolbio.com/wp-content/uploads/patch-clamp-protocol-final.pdf (2018).

  78. Hamill, O. P., Marty, A., Neher, E., Sakmann, B. & Sigworth, F. J. Improved patch-clamp techniques for high-resolution current recording from cells and cell-free membrane patches. Pflügers Arch. 391, 85–100 (1981).

    Article  CAS  Google Scholar 

  79. Edwards, F. A., Konnerth, A., Sakmann, B. & Takahashi, T. A thin slice preparation for patch clamp recordings from neurones of the mammalian central nervous system. Pflügers Arch. 414, 600–612 (1989).

    Article  CAS  Google Scholar 

  80. Stuart, G. J., Dodt, H. U. & Sakmann, B. Patch-clamp recordings from the soma and dendrites of neurons in brain slices using infrared video microscopy. Pflügers Arch. 423, 511–518 (1993).

    Article  CAS  Google Scholar 

  81. Suter, B. A. et al. Ephus: multipurpose data acquisition software for neuroscience experiments. Front. Neural Circuits 4, 100 (2010).

    Article  Google Scholar 

  82. Mostany, R. & Portera-Cailliau, C. A craniotomy surgery procedure for chronic brain imaging. J. Vis. Exp. 2008, e680 (2008).

  83. Tang, J. et al. Nanowire arrays restore vision in blind mice. Nat. Commun. 9, 786 (2018).

    Article  Google Scholar 

  84. Savchenko, A. et al. Graphene biointerfaces for optical stimulation of cells. Sci. Adv. 4, eaat0351 (2018).

    Article  Google Scholar 

  85. Yao, J., Liu, B. & Qin, F. Rapid temperature jump by infrared diode laser irradiation for patch-clamp studies. Biophys. J. 96, 3611–3619 (2009).

    Article  CAS  Google Scholar 

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Acknowledgements

This work was supported by the Air Force Office of Scientific Research (AFOSR FA9550-18-1-0503), the US Army Research Office (W911NF-18-1-0042), the US Office of Naval Research (N000141612530, N000141612958), the National Science Foundation (NSF MRSEC, DMR 1420709), the Searle Scholars Foundation, the National Institutes of Health (NIH NS101488, NS061963, GM030376, R21-EY023430, R21-EY027101), an MSTP Training Grant (T32GM007281), and the Paul and Daisy Soros Foundation. Atom-probe tomography was performed at the Northwestern University Center for Atom-Probe Tomography (NUCAPT), whose atom-probe tomography equipment was purchased and upgraded with funding from NSF-MRI (DMR-0420532) and ONR-DURIP (N00014-0400798, N00014-0610539, N00014-0910781) grants. NUCAPT is a Research Facility at the Materials Research Center of Northwestern University, supported by the National Science Foundation’s MRSEC program (grant DMR-1121262). Instrumentation at NUCAPT was further upgraded by the Initiative for Sustainability and Energy at Northwestern (ISEN). This work made use of the Japan Electron Optics Laboratory (JEOL) JEM-ARM200CF and JEOL JEM-3010 TEM in the Electron Microscopy Service of the Research Resources Center at the University of Illinois at Chicago (UIC). The acquisition of the UIC JEOL JEM-ARM200CF was supported by an MRI-R2 grant from the National Science Foundation (DMR-0959470).

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Author notes

  1. These authors contributed equally: Yuanwen Jiang, Ramya Parameswaran, Xiaojian Li, João L. Carvalho-de-Souza.

Authors and Affiliations

  1. Department of Chemistry, The University of Chicago, Chicago, IL, USA

    Yuanwen Jiang & Bozhi Tian

  2. The James Franck Institute, The University of Chicago, Chicago, IL, USA

    Yuanwen Jiang, Xiang Gao & Bozhi Tian

  3. The Graduate Program in Biophysical Sciences, The University of Chicago, Chicago, IL, USA

    Ramya Parameswaran

  4. Department of Physiology, Feinberg School of Medicine, Northwestern University, Chicago, IL, USA

    Xiaojian Li & Gordon M. G. Shepherd

  5. Department of Biochemistry and Molecular Biology, The University of Chicago, Chicago, IL, USA

    João L. Carvalho-de-Souza & Francisco Bezanilla

  6. Insitute for Molecular Engineering, The University of Chicago, Chicago, IL, USA

    Lingyuan Meng

  7. Institute for Biophysical Dynamics, The University of Chicago, Chicago, IL, USA

    Francisco Bezanilla & Bozhi Tian

  8. Centro Interdisciplinario de Neurociencia de Valparaíso, Facultad de Ciencias, Universidad de Valparaíso, Valparaíso, Chile

    Francisco Bezanilla

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Contributions

Y.J., R.P., X.L., J.L.C.-d.-S., F.B., G.M.G.S., and B.T. developed the protocol. Y.J., R.P., X.L., and J.L.C.-d.-S. performed the experiments. Y.J., R.P., X.L., and B.T. wrote the manuscript with input from J.L.C.-d.-S., X.G., L.M., F.B., and G.M.G.S.

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Correspondence to Yuanwen Jiang or Bozhi Tian.

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Journal peer review information: Nature Protocols thanks Tal Dvir and other anonymous reviewer(s) for their contribution to the peer review of this work.

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Key references using this protocol

Jiang, Y. et al. Nat. Mater. 15, 1023–1030 (2016): https://doi.org/10.1038/nmat4673

Parameswaran, R. et al. Nat. Nanotechnol. 13, 260–266 (2018): https://doi.org/10.1038/s41565-017-0041-7

Jiang, Y. et al. Nat. Biomed. Eng. 2, 508–521 (2018): https://doi.org/10.1038/s41551-018-0230-1

Supplementary information

Reporting Summary

Supplementary Data 1

Mask design for the Si mesh structure

Supplementary Data 2

Mask design for the SU-8 pillar structure

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Jiang, Y., Parameswaran, R., Li, X. et al. Nongenetic optical neuromodulation with silicon-based materials. Nat Protoc 14, 1339–1376 (2019). https://doi.org/10.1038/s41596-019-0135-9

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