Abstract
Compliant mechanisms are single-piece flexible structures that deliver the desired motion by undergoing elastic deformation as opposed to jointed rigid body motions of conventional mechanisms. Compliance in design leads to jointless, no-assembly (Fig. 1), monolithic mechanical devices and is particularly suited for applications with small range of motions. The compliant windshield wiper shown in Fig. 1 illustrates this paradigm of no-assembly. Conventional flexural mechanisms employ flexural joints that connect relatively rigid links as depicted in Fig. 2. Reduced fatigue life, high stress concentration and difficulty in fabrication are some of the drawbacks of flexural joints. Our focus is on designing compliant mechanisms with distributed compliance which employs flexural links (see Fig. 3) and have no joints (neither pin nor flexural joints) for improved reliability, performance, and ease of manufacture. Distributed compliant mechanisms derive their flexibility due to topology and shape of the material continuum rather than concentrated flexion at few regions. This paper focuses on the unique methodology employed to design jointless mechanisms with distributed compliance. The paper also illustrates a compliant stroke amplification mechanism that was recently designed, fabricated and tested for MEMS application.
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References
Ananthasuresh, G. K. and Kota, S., “Designing compliant mechanisms.” ASME Mechanical Engineering, pp. 93-96, November 1995.
Ananthasuresh, G. K., Saggere, L. and (Advisor) Kota, S., “A single-piece compliant stapler,” in Proc. of the 1994 ASME Mechanisms Conference-Student Design Competition, 1994.
Frecker, M. I., Ananthasuresh, G. K., Nishiwaki, N., Kikuchi., N. and Kota, S., “Topological synthesis of compliant mechanisms using multi-criteria optimization.” Journal of Mechanical Design, Transactions of the ASME 119(2), pp. 238-245, June 1997.
Hetrick, J. and Kota, S., “An energy formulation for parametric size and shape optimization of compliant mechanisms.” Journal of Mechanical Design 121, pp. 229-234, 1999.
Joo, J., Kota, S. and Kikuchi, N., “Topological synthesis of compliant mechanisms using linear beam elements.” Mechanics of Structures and Machines 28(4), pp. 245-280, 2000.
Saggere, L. and Kota, S., “Static shape change of adaptive structures using compliant mechanisms.” AIAA Journal 37(5), pp. 572-578, 1999.
Sniegowski, J. J. and Rodgers, M. S., “Multi-layer enhancement to polysilicon surface-micromachining technology.” IEDM 97, pp. 903-906, 1997.
Steven, M. Rodgers and Sniegowski, J. J., “5-level polysilicon surface micromachine technology: Application to complex mechanical systems.” 1998 Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, pp. 144-149, 6/8-11/1998.
Rodgers, M. S. et al., “Intricate mechanisms-on-a-chip enabled by 5-level surface micromachining.” 10th International Conference on Solid-State Sensors and Actuators, Transducers '99, Digest of Technical Papers, II, Sendai, Japan, pp. 990-993, 6/7-10/1999.
Ananthasuresh, G. K., Kota, S. and Gianchandani, Y., “Solidstate sensor and actuator workshop.” pp. 189-192, 1994.
Bendsoe, M. P. and Kikuchi, N., 1988, “Generating optimal topologies in structural design using a homogenization method.” Computer Methods in Applied Mechanics and Engineering 71, pp. 197-224, 1988.
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Kota, S., Joo, J., Li, Z. et al. Design of Compliant Mechanisms: Applications to MEMS. Analog Integrated Circuits and Signal Processing 29, 7–15 (2001). https://doi.org/10.1023/A:1011265810471
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DOI: https://doi.org/10.1023/A:1011265810471