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Microfabricated Polysilicon Microneedles for Minimally Invasive Biomedical Devices

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Abstract

A two-wafer polysilicon micromolding process has been developed for the fabrication of hollow tubes useful for microfluidic applications. These small tubes can be fabricated with a pointed end, resulting in a micro hypodermic injection needle. Microneedles are desired because they reduce both insertion pain and tissue damage in the patient. Such microneedles may be used for low flow rate, continuous drug delivery, such as the continuous delivery of insulin to a diabetic patient. The needles would be integrated into a short term drug delivery device capable of delivering therapeutics intradermally for about 24 hours. In addition, microneedles can be used for sample collection for biological analysis, delivery of cell or cellular extract based vaccines, and sample handling providing interconnection between the microscopic and macroscopic world.

The strength of microneedles was examined analytically, experimentally and by finite element analysis. Metal coatings provide significant increases in the achievable bending moments before failure in the needles. For example, a 10 μ m platinum coating increased the median bending moment of a 160 μ m wide, 110 μ m high microneedle with a 20 μ m wall from 0.25 to 0.43 mNm. In addition, fluid flow in microneedles was studied experimentally. Microneedles 192 μ m wide, 110 μ m high and 7 mm long have flow rates of 0.7 ml/sec under a 138 kPa inlet pressure. This flow capacity exceeds previous microneedle capacities by an order of magnitude.

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References

  1. N. Talbot and A.P. Pisano, Proceedings 1998 Solid State Sensor and Actuator Workshop Hilton Head, S.C., 25-268, (1998).

  2. L. Lin, A.P. Pisano, and R.S. Muller, Solid State Sensors and Actuator Conference, Transducers '93, Japan, 237-240 (1993).

  3. J. Chen and K.D. Wise, Solid State Sensor and Actuator Workshop, Hilton Head, S.C., 256-259 (1994).

  4. K.S. Lebouitz and A.P. Pisano, Proceedings Microstructures and Microfabrication Systems IV, 194th meeting of the Electrochemical Society, Boston, MA, 1-6 (1998).

  5. S. Henry, D.V. McAllister, M. Allen, and M. Prausnit, Proceedings of the IEEE Eleventh Annual International Workshop on MEMS, Heidelberg, Germany, 494-498 (1998).

  6. D.V. McAllister, F. Cros, S.P. Davis, L.M. Matta, M.R. Prausnitz, and M.G. Allen, Transducers '99, 1098-1101 (1999).

  7. D.V. McAllister, S. Kaushik, P.N. Patel, J.L. Mayberry, M.G. Allen, and M.R. Prausnitz, Proceedings of the First Joint BMES/EMBS Conference, Atlanta, GA, USA, 13–16 Oct. 1999; Piscataway, NJ, USA, IEEE, 1999 2, 836.

    Google Scholar 

  8. I.E. Papautsky, J.D. Brazzle, H. Swerdlow, and A.B. Frazier, IEEE International Conference on Engineering in Medicine and Biology Conference, (Chicago, IL, 1997).

  9. J. Brazzle, I. Papautsky, and A.B. Frazier, IEEE Engineering in Medicine and Biology Magazine, 18(6), 53-58 (IEEE, 1999).

    Google Scholar 

  10. J. Brazzle, D. Bartholomeusz, R. Davies, J. Andrade, R.A. Van Wageman, and A.B. Frazier, Proceedings 2000 Solid State Sensor and Actuator Workshop Hilton Head, S.C., 199-202 (2000).

  11. J.E. Lemons, F.J. Schoen, A.S. Hoffmann, and B.D. Rater (eds), Biomaterials Science: An Introduction to Materials in Medicine, (Academic Press, San Diego, CA., 1996), 165-173.

    Google Scholar 

  12. A. Bolz and M. Schaldach, Medical and Biological Engineering and Computing 31,Suppl:S123-S130 (1993).

    Google Scholar 

  13. M.Q. Zhang, T. Desai, and M. Ferrari, Biomaterials 19(10), 953-960 (1998).

    Google Scholar 

  14. C.G. Keller and R.T. Howe, International Solid State Sensors and Actuator Conference. Transducers '95, Stockholm, Sweden, 376-379 (1995).

  15. P. Krulevitch, G.C. Johnson, and R.T. Howe, Mat. Res. Soc. Symp. Proc. 276, 79-84 (1992).

    Google Scholar 

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Authors and Affiliations

  1. Berkeley Sensor and Actuator Center, University of California at Berkeley, Berkeley, CA, 94720 and

    Jeffrey D. Zahn, Neil H. Talbot, Dorian Liepmann & Albert P. Pisano

  2. Department of Bioengineering, University of California at Berkeley, Berkeley, CA, 94720

    Jeffrey D. Zahn & Dorian Liepmann

  3. Department of Mechanical Engineering, University of California at Berkeley, Berkeley, CA, 94720

    Neil H. Talbot, Dorian Liepmann & Albert P. Pisano

Authors
  1. Jeffrey D. Zahn
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  2. Neil H. Talbot
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  3. Dorian Liepmann
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  4. Albert P. Pisano
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Zahn, J.D., Talbot, N.H., Liepmann, D. et al. Microfabricated Polysilicon Microneedles for Minimally Invasive Biomedical Devices. Biomedical Microdevices 2, 295–303 (2000). https://doi.org/10.1023/A:1009907306184

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  • DOI: https://doi.org/10.1023/A:1009907306184

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