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Sol-Gel Deposited Sb-Doped Tin Oxide Films

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Abstract

The structural, electrical and optical properties of single sol-gel derived antimony-doped tin oxide (ATO) films sintered at 550°C have been measured. The reproducibility of both the preparation and the characterization procedures have been tested by a round-robin test involving eight laboratories within a Concerted European Action (CEA) project. The resistivity measured as a function of Sb content has been obtained by electric and reflectance and transmission measurements. Their differences are discussed in terms of structural and grain boundary effects. An increase of Sb content results in a decrease of the crystallite size (7.0 to 5.4 nm) and a greater influence of the grain boundary.

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References

  1. K.L. Chopra, S. Major, and D.K. Pandya, Thin Solid Films 102, 1 (1983).

    Google Scholar 

  2. C.G. Granquist, Thin Solid Films 193/194, 730 (1990).

    Google Scholar 

  3. C.M. Lampert, Solar Energy Mater. 6, 1 (1981).

    Google Scholar 

  4. W. Göpel and K.-D. Schierbaum, Sens. Actuators B 26/27, 1 (1995).

    Google Scholar 

  5. Yoshizumi and K. Wakabayashi, Plastics Eng. 61 (1987).

  6. Ono, T. Yamanaka, Y. Kubokawa, M. Komiyama, and J. Catal. 109, 423 (1988).

  7. C.J.R. Gonzales-Oliver and I. Kato, J. Non-Cryst. Solids 82, 400 (1986).

    Google Scholar 

  8. G. Gowda and D. Nguyen, Thin Solid Films 136, L39 (1986).

    Google Scholar 

  9. Y. Takahashi and Y. Wada, J. Electrochem. Soc. 137, 267 (1990).

    Google Scholar 

  10. J.C. Giuntini, W. Granier, J.V. Zanchetta, and A. Taha, J. Mater. Sci. Lett. 9, 1383 (1990).

    Google Scholar 

  11. B. Orel, U. Lavrencic-Stangar, Z. Crnjak-Orel, P. Bukovec, and M. Kosec, J. Non-Cryst. Solids 167, 272 (1994).

    Google Scholar 

  12. J.P. Chatelon, C. Terrier, E. Bernstein, R. Berjoan, and J.A. Roger, Thin Solid Films 247, 162 (1994).

    Google Scholar 

  13. S.-S. Park, H.X. Zheng, J.D. Mackenzie, Mater. Lett. 22, 175 (1995).

    Google Scholar 

  14. C. Terrier, J.P. Chatelon, R. Berjoan, J.A. Roger, Thin Solid Films 263, 37 (1995).

    Google Scholar 

  15. P. Olivi, E.C. Pereira, E. Longo, T.A. Varella, and L.O.de S. Bulhões, J. Electrochem., Soc. 140, L81 (1993).

    Google Scholar 

  16. E. Shanti, V. Dutta, A. Banerjee, and K.L. Chopra, J. Appl. Phys. 51, 6243 (1980).

    Google Scholar 

  17. Concerted European Action on “Sol-Gel Processing for Advanced Industrial Material Technologies.”

  18. M. Guglielmi, E. Menegazzo, M. Paolizzi, G. Gasparro, D. Ganz, J. Pütz, M.A. Aegerter, L. Hubert-Pfalzgraf, C. Pascual, A. Durán, H.X. Willems, M. van Bommel, L. Büttgenbach, and L. Costa, to be published.

  19. S. Gaign and L.G. Hubert-Pfalzgraf, to be published.

  20. D. Bélanger, J.P. Dodelet, B.A. Lombos, and J.I. Dickson, J. Electrochem. Soc. 132, 1398 (1985).

    Google Scholar 

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Guglielmi, M., Menegazzo, E., Paolizzi, M. et al. Sol-Gel Deposited Sb-Doped Tin Oxide Films. Journal of Sol-Gel Science and Technology 13, 679–683 (1998). https://doi.org/10.1023/A:1008636804449

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  • DOI: https://doi.org/10.1023/A:1008636804449

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