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Electromechanical properties and acoustic response of integrated PZT thin films

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Journal of Materials Science Letters

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References

  1. J. F. SCOTT and C. A. P. ARAUZO, Science 246 (1989) 1400.

    Google Scholar 

  2. B. G. POTTER, J. M. B. SINCLAIR and D. DIMOS, Appl. Phys. Lett. 63 (1993) 2180.

    Google Scholar 

  3. D. L. POLLA and L. F. FRANCIS, Ann. Rev. Mater. Sci. 28 (1998) 563.

    Google Scholar 

  4. P. MURALT, in Proc. 10th IEEE International Symposium on Applications of Ferroelectrics, East Brunswick, NJ August 1996, edited by B. M. Kulwicki, A. Amin and A. Safari (IEEE Piscataway, NJ, 1996) p. 145.

    Google Scholar 

  5. P. MURALT, M. KOHLI, T. MAEDER, A. KHOLKIN, K. BROOKS, N. SETTER and R. LUCTHIER, Sensors and Actuators A 48 (1995) 157.

    Google Scholar 

  6. M. SAYER, C. V. R. VASANT KUMAR, D. BARROW, L. ZOU and D. T. AMM, in Ferroelectric Thin Films II, Mater. Res. Soc. Symp. Proc., Vol. 243, edited by A. I. Kingon, E. R. Myers and B. Tuttle (MRS, Pittsburgh, PA, 1992) p. 39

    Google Scholar 

  7. C. LEE, IEEE Trans. Ultra. Ferro. Freq. Control 43 (1996) 553.

    Google Scholar 

  8. C. B. SCRUBBY, J. Phys. E: Sci. Instrum. 20 (1987) 946.

    Google Scholar 

  9. K. D. BUDD, S. K. DEY and D. A. PAYNE, Brit. Ceram. Proc. 36 (1985) 107.

    Google Scholar 

  10. J.-F. LI, P. MOSES and D. VIEHLAND, Rev. Sci. Instrum. 66 (1995) 215.

    Google Scholar 

  11. A. L. KHOLKIN, C. WUTCHRICH, D. V. TAYLOR and N. SETTER, Rev. Sci. Instr. 67 (1996) 1935.

    Google Scholar 

  12. E. L. COLLA, S. HONG, D. V. TAYLOR, A. K. TAGANTSEV, N. SETTER and K. NO, Appl. Phys. Lett. 72 (1998) 2763.

    Google Scholar 

  13. A. L. KHOLKIN, K. G. BROOKS, D. V. TAYLOR, S. HIBOUX and N. SETTER, Integrated Ferroelectrics 22 (1998)

  14. J.-F. LI, D. VIEHLAND, T. TANI, C. D. E. LAKEMAN and D. A. PAYNE, J. Appl. Phys. 75 (1994) 442.

    Google Scholar 

  15. C.-R. CHO, W.-J. LEE, B.-G. YU and B.-W. KIM, ibid. 86 (1999) 2700.

    Google Scholar 

  16. C.-R. CHO, L. F. FRANCIS and M.-S. JANG, Jpn. J. Appl. Phys. 38 (1999) L751.

    Google Scholar 

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Authors and Affiliations

  1. Department of Chemical Engineering and Materials Science, and Microtechnology Laboratory, University of Minnesota, Minneapolis, MN, 55455, USA

    C.-R. Cho

  2. Department of Chemical Engineering and Materials Science, and Microtechnology Laboratory, University of Minnesota, Minneapolis, MN, 55455, USA

    L. F. Francis

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  1. C.-R. Cho
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  2. L. F. Francis
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Cho, CR., Francis, L.F. Electromechanical properties and acoustic response of integrated PZT thin films. Journal of Materials Science Letters 19, 1477–1479 (2000). https://doi.org/10.1023/A:1006744027172

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