Elsevier

Solid State Ionics

Volume 181, Issues 5–7, 11 March 2010, Pages 322-331
Solid State Ionics

Electrical characterization of thermomechanically stable YSZ membranes for micro solid oxide fuel cells applications

https://doi.org/10.1016/j.ssi.2009.12.019Get rights and content

Abstract

Yttria-stabilized zirconia free-standing membranes were fabricated by pulsed laser deposition on Si/SiO2/Si3N4 structures for developing silicon-based micro devices for micro solid oxide fuel cell applications. Their mechanical stability under working conditions was evaluated satisfactorily by applying thermal cycling to the membranes. Membranes mechanically stable at operating temperatures as high as 700 °C were obtained for deposition temperatures in the range between 400 and 700 °C. Thermomechanical behavior as measured by X-ray microdiffraction was correlated with the evolution of the microstructure with the temperature from TEM analysis, comparing as-deposited and post-deposition annealed membranes. Electrical properties of both yttria-stabilized zirconia films and membranes were studied by DC conductivity and impedance spectroscopy, respectively. A difference of almost one order of magnitude was measured between bulk and stressed films while conductivities close to the bulk were observed for YSZ membranes. Values of area specific resistance of 0.15 Ωcm2 were measured at temperatures below 450 °C for 240 nm thick YSZ membranes deposited at 600 °C and annealed at the same temperature for 2.5 h.

Introduction

Power supply of portable electronic devices has become an active research field because of the proliferation of devices such as laptops or mobile phones. Due to their long life time, high power density and integrability, micro batteries and micro fuel cells appear as promising power generators to cover these needs. Among others, the most promising types of fuel cells for portable applications are the so-called micro-polymer electrolyte fuel cells (µPEMFCs) and, after recent advances, micro-solid oxide fuel cells (µSOFCs) [1], [2]. In particular, µSOFCs present advantages like a high efficiency in energy conversion, large energy density and the capability of operation using different fuels (including hydrocarbons). Moreover, miniaturization of SOFCs by both reduction of the electrolyte thickness and integration into Micro Electro Mechanical Systems (MEMS) have been shown as an effective strategy for reducing the operating temperature and subsequently the thermal response time (warm-up and cycling), the energy consumption and the materials reactivity. Recent successful experiences from ETH Zurich [3], [4], Stanford [5], [6], [7] and Harvard [8] have triggered increasing interest in this field, showing the potential of micro SOFC at temperatures below 500 °C. For a comprehensive report on the current status of development of micro-SOFCs refer to the extensive review by Evans et al. [2].

As previously mentioned, one of the key points for the development of micro-SOFCs is the reduction of the electrolyte thickness to the sub-millimetre range to trivially decrease the electrolyte contribution to the total resistance. In addition, both the reduction of the electrolyte thickness to values comparable to the grain size and the reduction of this grain size to the nanoscale have been proposed as strategies for increasing the ionic conductivity based on thin films [9], [10] and surface exchange [5]. Although big efforts have been devoted to understand these and other effects of nanoscale on ionic transport there is still an ongoing controversy over it. This is mainly due to the fact that thin films cannot be prepared without a substrate, which intrinsically difficult any type of characterization because of both the stress induced by the substrate and the forced in-plane geometry of the measurement. In particular, electrical, mechanical and (micro) structural characterization presents significant problems [11], [12], [13], [14].

In the case of micro-SOFCs, comprehensive understanding of the ionic conduction across the electrolyte as well as the evolution with the temperature of the (micro) structure and mechanical stress of the involved thin films is of the utmost importance for the final performance of the device. Moreover, in all of the reported micro-SOFCs [2], the active area is indeed restricted to the free-standing part of the thin film; therefore, special emphasis should be put in its specific characterization. However, very few papers have been devoted to this although strong differences are expected between attached thin films and suspended areas, e.g. in the stress state [15], [16], [17] and therefore the electrical behaviour [12], [18]. For instance, it is well-known that important residual stresses are present in PLD fabricated YSZ membranes depending on different deposition conditions [14], [15] but the effect of this on the thermomechanical stability, crystallinity or electrical behaviour of the membrane remains still unclear.

This work evaluates and throws light on some of these aspects by electrically characterizing yttria-stabilized zircona (YSZ), the state-of-the-art electrolyte material for SOFCs, using an approach based on free-standing membranes that allow a direct access to cross-plane properties. Self-supported YSZ membranes on Silicon-based microplatforms were fabricated for this goal using Pulsed Laser Deposition (PLD). This study puts particular emphasis on the critical point of the stress evolution of the membrane with the temperature, i.e. the thermomechanical stability, and the correlation of this mechanical evolution with the electrical behaviour and microstructural changes. In-plane and cross-plane conductivity of the membrane were evaluated by DC and AC measurements while the (micro) structural characterization was carried out by transmission electron microscopy (TEM), micro X-ray diffraction (micro-XRD) and micro Raman analysis. The here presented microplatforms have been also discussed as the initial step for a future integration of micro-SOFCs into MEMS.

Section snippets

YSZ-free standing membranes micro fabrication

The technological flow of the free-standing membranes fabrication process is shown in Fig. 1 and detailed in reference [15]. Before depositing YSZ some micromachining steps were required. Single crystal (100)-oriented p-type silicon wafers of 100 mm diameter and 300 µm thick were thermally oxidized to obtain a 100 nm thick layer of SiO2. Afterward, low pressure chemical vapor deposition (LPCVD) was used to grow 300 nm thick layers of Si3N4 (Fig. 1a). A photolithographic step on the back side of the

Results and discussion

First of all, it is important to remark that the fabrication process of the YSZ self-supported membranes is highly reliable (see an image of the released membrane in Fig. 3a). In order to quantify this it is possible to define a survival rate (SR) as the ratio between the total number of fabricated membranes and the membranes broken after the deposition (the statistic was carried out over more than one hundred membranes). Membranes deposited at Ts = 200, 400, 600 and 700 °C yielded a high survival

Conclusions

Free-standing YSZ membranes of thickness between t = 60–240 nm and side length in the range of a = 50–820 µm were fabricated on Silicon based microplatforms in order to evaluate their suitability for working as electrolytes in low-to-intermediate temperature micro SOFCs. High density, homogeneity and excellent thermomechanical stability at post-deposited annealing temperatures as high as 700 °C were observed for a range of deposition temperatures of Ts = 400–700 °C. This high deposition temperature has

Acknowledgments

This investigation has been supported by the Spanish Ministry of Science and Education (MAT-2008-04931, CSD-2008-023 and TEC-2007-64669 projects) and the “Generalitat de Catalunya” (2009-SGR-228). A.T., N.S would like to thank the financial support of the postdoctoral program “Ramón y Cajal” (MICINN) and A.C to the postdoctoral program “Juan de la Cierva” (MICINN).

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