RAPID COMMUNICATIONWater-resistant flexible GaN LED on a liquid crystal polymer substrate for implantable biomedical applications
Graphical abstract
Highlights
► We fabricate a flexible GaN light-emitting diode (LED) on a liquid crystal polymer (LCP) substrate for biomedical applications. ► We demonstrate the mechanically and optically stable characteristics of the flexible GaN LED. ► A phosphor-coated white GaN LED shows its potential as a next-generation flexible light source. ► A water-resistant and biocompatible flexible LED biosensor detects prostate-specific antigen.
Introduction
Light-emitting diodes (LEDs) have superior characteristics, such as long-term stability, high efficiency, and strong brightness compared to conventional incandescent lamps. With these advantages, LEDs have been developed and explored for not only consumer electronics such as energy efficient light lamp, back-light unit (BLU), and active matrix organic LED (AMOLED) but also medical applications, including body composition detectors (e.g., hemoglobin [1], human body fat [2], prostate-specific antigen (PSA) [3], and cholesterol [4]), and therapy devices (e.g., sterilization [5], skin homeostasis [6], and operation lamps [7]). In particular, flexible LEDs, which can conformally contact on curvilinear surface, have intrigued researchers in the field of biosensors and micro-sized surgery robots for non-bleeding diagnoses and treatment.
Organic LEDs (OLEDs) have been studied actively over the last two decades with the feasibility of flexible devices [8], [9], [10], [11], [12]. However, OLEDs have drawbacks such as short lifetime (∼10,000 h) [13] low efficiency, low brightness, and low stability in humidity condition compared to inorganic LEDs (ILEDs) [14], [15]. Although the first flexible GaN materials were demonstrated in 2005 by the author [16], the first flexible III–V LEDs were presented by Kim et al. using micro-structured GaAs (μs-GaAs) [17], [18], [19], [20]. Their μs-GaAs LEDs printed on a polyethylene terephthalate (PET) substrate were applied to detect glucose concentrations from the variation of transmitted light intensities. However, the GaAs-based LED, which emits only infrared and red light, ultimately limits the possible applications due to its narrow wavelength range. Recently in 2011, Kim et al. established the flexible GaN ILED by micro-structure transferring process [21]. Although they proposed the feasibility for flexible LED applications in display, it did not provide the opportunity for biomedical devices.
Herein, for the first time, single crystal micro-structured GaN (μs-GaN) was employed for the water-resistance and biomedical applications. The superb properties of the GaN material in terms of its wide band gap and high efficiency enable the dramatic extension of not only consumer electronic applications (13 billion dollar market of GaN itself in 2011) [22] but also the biosensing scale [23], [24], [25], [26], [27], [28]. In this study, we describe four works on flexible ILEDs, as follows: (1) establishment of the flexible GaN ILED that can be applied to full color RGB elements [24] and controllable micro-patterned LED arrays; (2) a flexible white LED created through a combination of a blue GaN LED and yellow phosphor, which can be utilized for the promising flexible BLU [25]; (3) a water-resistant and flexible GaN LED on a liquid crystal polymer (LCP) substrate packaged by biocompatible polytetrafluoroethylene (PTFE), promising candidate materials that enables robustness in body-implanted conditions [29], and (4) diagnosis of diseases (e.g., PSA) by detecting antigen–antibody reactions using the flexible GaN LED and photodiode.
Section snippets
Results and Discussion
Figs. 1a and S1 illustrate a schematic structure and the fabrication steps of μs-GaN LED arrays settled on a plastic substrate with the related scanning electron microscopy (SEM)/optical images. GaN LED epitaxial layers were accumulated on a Si (1 1 1) substrate by metal organic chemical vapor deposition (MOCVD; Fig. S1a). The annealing at 600 °C of Au/Cr layers stacked on n-/p-GaN as contact pads enabled the formation of ohmic contact (Fig. S1b). The deposited GaN LED layers were then transferred
Summary
In summary, we fabricated the nitride-based flexible LED on a LCP substrate for the first water-resistance and biosensor applications. A bending test of the radius up to 2.1 mm and a cycling test up to 2000 times demonstrated that our flexible GaN LED is mechanically and optically stable on flexible substrates. The flexible white LEDs demonstrate the feasibility of using a white light source for future flexible BLU display and an implantable micro-sized robot. Using water-resistant and
Growth of GaN LED epitaxial layers on a Si (1 1 1) substrate
The GaN LED epitaxial layers were made up of In0.17Ga0.83N multi-quantum well (MQW) structures, InGaN/GaN underlying superlattices (SLs), cladding layers, and buffer layers grown on a Si (1 1 1) substrate.
Forming the ohmic contact pads
For the n-GaN ohmic contact, n+-(In)GaN/p-(In)GaN/MQW/SLs/n-GaN stacks were etched by an inductively coupled plasma reactive ion etcher (ICP-RIE, 25 mTorr, 5 sccm Ar/100 sccm Cl2, 400 W power/150 W bias, 90 s) until the n-GaN layer was exposed. Au/Cr layers (40 nm/5 nm in thickness) were deposited on
Acknowledgments
This work was supported by the KOCI (grant code: 10ZC1110: Basic Research for the Ubiquitous Lifecare Module Development) and Basic Science Research Program (grant codes: 2010-0028161, CAFDC-2010-0009903) through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology.
Prof. Keon Jae Lee received his Ph.D. degree from the University of Illinois, Urbana-Champaign, in 2006. During his Ph.D. course at UIUC, he was involved in the first co-invention of “High Performance Flexible Single Crystal Electronics", called microstructured silicon and GaN. From 2006 to 2008, he conducted a joint research project of Unisantis (Japan) and IME (Singapore) in the field of three dimensional surrounding gate nano-transistors (SGT) for the future logic technology. Since 2009, he
References (41)
- et al.
Am. J. Clin. Nutr.
(1984) - et al.
Sensors Actuators B-Chem.
(2009) - et al.
Org. Electron.
(2009) - et al.
IEEE Trans. Biomed. Eng.
(2011) - et al.
Microelectron. Reliab.
(2001) - et al.
Am. J. Cardiol.
(2000) - et al.
J. Biomed. Opt.
(2002) - et al.
Appl. Phys. Lett.
(2010) - et al.
Biomedical Optical Instrumentation and Laser-assisted Biotechnology
(1996) - et al.
J. Appl. Microbiol.
(2007)
Eur. J. Dermatol.
Proc. SPIE
Appl. Phys. Lett.
Nat. Mater.
Konika Minolta Technol. Rep.
Adv. Mater.
Nature
Small
Nat. Mater.
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Prof. Keon Jae Lee received his Ph.D. degree from the University of Illinois, Urbana-Champaign, in 2006. During his Ph.D. course at UIUC, he was involved in the first co-invention of “High Performance Flexible Single Crystal Electronics", called microstructured silicon and GaN. From 2006 to 2008, he conducted a joint research project of Unisantis (Japan) and IME (Singapore) in the field of three dimensional surrounding gate nano-transistors (SGT) for the future logic technology. Since 2009, he has been an Assistant Professor in MSE at KAIST. His current research interests are flexible and nanobio devices for health, self-powered energy, and electronic applications.
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These corresponding authors have equally contributed.